Xianying Dai
Xidian University
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Publication
Featured researches published by Xianying Dai.
international conference on electron devices and solid-state circuits | 2009
Bin Shu; Heming Zhang; Rongxi Xuan; Xianying Dai; Huiyong Hu; Jianjun Song; Liang Liang; Jianan Cui
The mechanism of compressive stress in silicon nitride membrane is studied in this paper. The effects of the various process parameters on the compressive stress in silicon nitride are analyzed and discussed on the basis of the current method using PECVD equipment. The high compressive stress silicon nitride membrane has been fabricated on the optimization of the process parameters, and the compressive stress is up to −1.08GPa. Finally, the method of further improving the compressive stress in silicon nitride membrane is put forward.
Archive | 2010
Jianjun Song; Huiyong Hu; Heming Zhang; Rongxi Xuan; Bin Shu; Guanyu Wang; Xianying Dai
Science China-physics Mechanics & Astronomy | 2010
Jianjun Song; HeMing Zhang; Huiyong Hu; Xianying Dai; Rongxi Xuan
Archive | 2010
Jianjun Song; Xianying Dai; Huiyong Hu; Bin Shu; Lixia Zhao; Heming Zhang; Rongxi Xuan
Archive | 2010
Xianying Dai; Jianjun Song; Huiyong Hu; Xiaoyan Wang; Bin Shu; Heming Zhang; Rongxi Xuan; Guanyu Wang
Archive | 2010
Heming Zhang; Bin Shu; Guanyu Wang; Jiangtao Qu; Xiaobo Xu; Rongxi Xuan; Jianjun Song; Lixia Zhao; Huiyong Hu; Xianying Dai
Archive | 2009
Huiyong Hu; Heming Zhang; Bin Shu; Rongxi Xuan; Xianying Dai; Jianjun Song; Lixia Zhao; Jiangtao Qu; Xiaobo Xu
Archive | 2009
Huiyong Hu; Heming Zhang; Xianying Dai; Rongxi Xuan; Jianjun Song; Bin Shu; Xiaoyan Wang
Archive | 2009
Huiyong Hu; Heming Zhang; Xianying Dai; Jianjun Song; Bin Shu; Rongxi Xuan; Lixia Zhao; Xiaoyan Wang
Archive | 2009
Heming Zhang; Xianying Dai; Bin Shu; Rongxi Xuan; Huiyong Hu; Jianjun Song; Guanyu Wang; Xiaobo Xu; Jiangtao Qu
