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Yang-Sik Shin

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Publication

Featured researches published by Yang-Sik Shin.

Archive | 2012

SUBSTRATE PROCESSING APPARATUS INCLUDING HEAT-SHIELD PLATE

Il-Kwang Yang; Sung-Tae Je; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2012

Substrate processing apparatus including exhaust ports and substrate processing method

Il-Kwang Yang; Sung-Tae Je; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2012

Substrate processing apparatus including auxiliary gas supply port

Il-Kwang Yang; Sung-Tae Je; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2012

Substrate processing apparatus including processing unit

Il-Kwang Yang; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2013

HEATER MOVING TYPE SUBSTRATE PROCESSING APPARATUS

Il-Kwang Yang; Byoung-Gyu Song; kyong-Hun Kim; Yong-ki Kim; Yang-Sik Shin

Archive | 2012

APPARATUS FOR PROCESSING SUBSTRATE FOR SUPPLYING REACTION GAS HAVING PHASE DIFFERENCE

Il-Kwang Yang; Sung-Tae Je; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2012

Showerhead having cooling system and substrate processing apparatus including the showerhead

Il-Kwang Yang; Byoung-Gyu Song; Yong-ki Kim; kyong-Hun Kim; Yang-Sik Shin

Archive | 2013

Heater-elevatable substrate processing apparatus

Il-Kwang Yang; 양일광; Byoung-Gyu Song; 송병규; kyong-Hun Kim; 김경훈; Yong-ki Kim; 김용기; Yang-Sik Shin; 신양식

Archive | 2012

APPARATUS FOR PROCESSING APPARATUS HAVING SIDE PUMPING TYPE

Il-Kwang Yang; Byoung-Gyu Song; kyong-Hun Kim; Yang-Sik Shin

Archive | 2012

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Il-Kwang Yang; Gyoung-Gyu Song; kyong-Hun Kim; Yong-ki Kim; Yang-Sik Shin

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Collaboration

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Kyung-hoon Kim

SK Hynix

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Yong-ki Kim

SK Hynix

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