Yasuhiko Hakotani

A Stud-bump-bonding Technique For High Density Multi-chip-module

technique for high density Multi-Chip-Module (MCM), using called Stud-Bump-Bonding (SBB) technique, which can bond bare LSI chips directly to ceramic substrate. Au bump is formed on electrode pad of LSI chip by a wirebonding apparatus. Each Au bump has two-stepped construction and bonded with a conductive adhesive to an electrode terminal formed on the ceramic substrate. The conductive adhesive is very flexible and strong in bond, thus resisting thermal and mechanical stresses. Moreover, repair technique has been developed. 100 ,u m pitch electrode pads of LSI chip can be bonded to electrode terminals. The bonding resistance is less than 50 m i l . memory module. High density and reliability in bonding for MCM have been attained by the SBB technique. We have developed advanced flip-chip bonding We have applied the SBB technique to high density MCM for

Development Of Zero X-y Shrinkage Sintered Ceramic Substrate

Studies of multilayered ceramic substrate are made briskly ,which makes it possible to design wiring patterns high densely and to mount bare IC chips. The multilayered cbramic substrate is expected for effectiveness for high functional, downsizing and confidential devices. In order to realize high density ceramic Multi-Chip-Module (MCM), multilayered ceramic substrate is required to satisfy demands for fine patterning, small packaging and low cost, Especially, sintering shrinkage of a substrate should be. controlled for fine patteming. Generally, the ceramic substrate undergoes its shrinkage of 10 to 15% and the shrinkage error is *OS%, so the substrate is not suitable for mounting bare IC chips. On considering of such problem, zero X-Y shrinkage sintered ceramic substrate (ZSS) has been developed by the conventional green sheet method, which arranges substrate green sheets between two no-shrinkage sheets, horizontal shrinkage during sintering is prevented to 0.18, and the shrinkage error i s f 0.05%. In this paper, we will report a material, process for prohibiting the horizontal shrinkage and properties of ZSS. .