Yasuhiro Omura
Nikon
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Yasuhiro Omura.
Optical Microlithography XVII | 2004
Tomoyuki Matsuyama; Toshiro Ishiyama; Yasuhiro Omura
This paper describes various kinds of technological improvements in ArF projection lenses for success in very low-k1 and high NA lithography. This paper covers optical design, lens manufacturing, aberration characterization, aberration manipulation, flare control, and linear polarizing illumination. Actual lens performance of the Nikon NSR-S307E (0.85NA ArF Optics) is also reviewed.
Archive | 2007
Yasuhiro Omura; Hironori Ikezawa
Archive | 2006
Yasuhiro Omura
Archive | 1997
Tetsuo Takahashi; Yasuhiro Omura
Archive | 2001
Tetsuo Takahashi; Jin Nishikawa; Yasuhiro Omura
Archive | 2002
Youhei Fujishima; Hironori Ikezawa; Toshihiko Ozawa; Yasuhiro Omura; Takeshi Suzuki
Archive | 2000
Yasuhiro Omura
Archive | 2002
Yasuhiro Omura
Archive | 2002
Yasuhiro Omura; Naomasa Shiraishi; Issey Tanaka; Soichi Owa; Toshihiko Ozawa; Shunsuke Niisaka
Archive | 2001
Yasuhiro Omura; Naomasa Shiraishi; Soichi Owa
