Yasukazu Mase
Toshiba
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Publication
Featured researches published by Yasukazu Mase.
international ieee vlsi multilevel interconnection conference | 1989
Masahiro Abe; Yasukazu Mase; T. Katsura; O. Hirata; T. Yamamoto; S. Koguchi
A novel multilevel interconnection system for bipolar or BiCMOS LSIs was developed. Bias sputtered quartz (BSQ) and plasma CVD SiO(P-SiO) constituted the stacked interlayer, making it possible to smooth high aspect ratio (0.82) topography. The electrical properties of the films and the manufacturing-process damage were investigated. The results show that the stacked structure offers good electrical stability and reliability. This system was successfully applied to real devices.<<ETX>>
Archive | 1990
Yasukazu Mase; Osamu Hirata; Masahiro Abe
Archive | 1988
Yasukazu Mase; Masahiro Abe; Osamu Hirata
Archive | 1985
Yasukazu Mase; Masahiro Abe; Masaharu Aoyama
Archive | 1991
Yasukazu Mase; Masahiro Abe; Tomie Yamamoto
Archive | 1984
Yasukazu Mase; Masahiro Abe; Masaharu Aoyama; Takashi Ajima
Archive | 1988
Masahiro Abe; Yasukazu Mase
Archive | 1993
Takeshi Sunada; Yasukazu Mase
Archive | 1989
Yasukazu Mase; Masahiro Abe
Archive | 1989
Masahiro Abe; Yasukazu Mase; Toshihiko Katsura
