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Koichi Fukaya

Ebara Corporation

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Publication

Featured researches published by Koichi Fukaya.

Archive | 2004

Substrate holding apparatus and polishing apparatus

Tetsuji Togawa; Hiroshi Yoshida; Osamu Nabeya; Makoto Fukushima; Koichi Fukaya

Archive | 2010

Substrate polishing apparatus and substrate polishing method

Tetsuji Togawa; Koichi Fukaya; Mitsuo Tada; Taro Takahashi; Yasunari Suto

Archive | 2005

Substrate holding device and polishing apparatus

Tetsuji Togawa; Hiroshi Yoshida; Osamu Nabeya; Makoto Fukushima; Koichi Fukaya

Archive | 2004

APPARATUS FOR HOLDING SUBSTRATE, AND APPARATUS FOR POLISHING SUBSTRATE

Koichi Fukaya; Makoto Fukushima; Osamu Nabeya; Tetsuji Togawa; Hiroshi Yoshida; 博 吉田; 哲二 戸川; 孝一 深谷; 誠 福島; 治 鍋谷

Archive | 2011

Substrate drying apparatus, substrate drying method and control program

Tomoatsu Ishibashi; Takahiro Ogawa; Kenichi Sugita; Shinji Kajita; Koichi Fukaya; Akira Nakamura

Archive | 2010

Liquid-scattering prevention cup, substrate processing apparatus and method for operating the apparatus

Takahiro Ogawa; Naoki Matsuda; Koichi Fukaya; Hiroyuki Kaneko

Archive | 2012

LIQUID SCATTERING PREVENTION CUP, SUBSTRATE PROCESSING APPARATUS PROVIDED WITH THE CUP, AND SUBSTRATE POLISHING APPARATUS

Hisajiro Nakano; Koichi Fukaya

Archive | 2011

Liquid scattering prevention cup, substrate processing apparatus including liquid scattering prevention cup, and substrate polishing apparatus

Hisajiro Nakano; 央二郎 中野; Koichi Fukaya; 孝一 深谷

Archive | 2012

Substrate holding flexible assembly, substrate polishing apparatus and method

Makoto Fukushima; Koichi Fukaya; Hiroshi Yoshida; Osamu Nabeya; Tetsuji Togawa

Archive | 2009

Organic gas concentration detection method of organic gas supply apparatus, organic gas supply apparatus, and method of operating organic gas supply apparatus

Koichi Fukaya; Tomoatsu Ishibashi; Hiroyuki Kaneko; Takahiro Ogawa; Kenichi Sugita; 貴弘 小川; 謙一 杉田; 孝一 深谷; 知淳 石橋; 浩之 金子

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Collaboration

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Tetsuji Togawa

Ebara Corporation

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Osamu Nabeya

Ebara Corporation

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Hiroshi Yoshida

Ebara Corporation

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Makoto Fukushima

Ebara Corporation

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Takahiro Ogawa

The Furukawa Electric Co.

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Hiroyuki Kaneko

Ebara Corporation

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Hisajiro Nakano

Ebara Corporation

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Kenichi Sugita

Ebara Corporation

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Mitsuo Tada

Ebara Corporation

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Taro Takahashi

Ebara Corporation

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