Yasushi Akiyama
AZ Electronic Materials
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Publication
Featured researches published by Yasushi Akiyama.
Proceedings of SPIE, the International Society for Optical Engineering | 2009
Takanori Kudo; Srinivasan Chakrapani; Alberto D. Dioses; Edward Ng; Charito Antonio; Deepa Parthasarathy; Shinji Miyazaki; Yuki Ubayashi; Kazuma Yamamoto; Yasushi Akiyama; Richard Collett; Mark Neisser; Munirathna Padmanaban
Developable bottom anti-reflective coatings (DBARC) are an emerging litho material technology. The biggest advantage of DBARC is that it eliminates the plasma etch step, avoiding damage to plasma sensitive layers during implantation. AZ has pioneered developable BARC based on photosensitive cleave as well as crosslink/decrosslink mechanisms. In this paper, we focus on the crosslink/decrosslink concept. DBARC/resist mismatching was corrected both from process and formulation sides. The optimized DBARC showed comparable lithographic performance as conventional BARCs. This paper provides the chemical concept of the photosensitive developable DBARCs, approaches for DBARC/resist matching and performance of photosensitive DBARCs for 248 nm and 193 nm exposures. Recent 193 nm immersion exposure results are also presented.
Archive | 2003
Yasushi Akiyama; Yusuke Takano
Archive | 2005
Jirou Matsuo; Kiyofumi Takano; Yusuke Takano; Yasushi Akiyama
Archive | 2014
Shigemasa Nakasugi; Kazuma Yamamoto; Yasushi Akiyama; Shinji Miyazaki; Munirathna Padmanaban; Srinivasan Chakrapani
Journal of Photopolymer Science and Technology | 2014
Ankit Vora; Anindarupa Chunder; Melia Tjio; Srinivasan Balakrishman; Elizabeth Lofano; Joy Cheng; Daniel P. Sanders; Eri Hirahara; Yasushi Akiyama; Orest Polishchuk; Margareta Paunescu; Durairaj Baskaran; SungEun Hong; Guanyang Lin
Journal of Photopolymer Science and Technology | 2010
Takanori Kudo; Srinivasan Chakrapani; Alberto D. Dioses; Edward Ng; Charito Antonio; Deepa Parthasarathy; Shinji Miyazaki; Kazuma Yamamoto; Yasushi Akiyama; Richard Collett; Mark Neisser; Murirathna Padmanaban
Archive | 2008
Go Noya; Yasushi Akiyama; Yusuke Takano
Archive | 2007
Katsutoshi Kuramoto; Masakazu Kobayashi; Yasushi Akiyama
Archive | 2006
Yasushi Akiyama; Masaichi Kobayashi; Katsutoshi Kuramoto; Takeshi Noya; Ryuta Shimazaki
Archive | 2002
Yasushi Akiyama; Seion Ko; Tetsuo Okayasu; Kiyohisa Takahashi; Yusuke Takano; 岡安 哲雄; 洪 聖恩; 秋山 靖; 高橋 清久; 高野 祐輔
