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Yasutaka Tochihara

Hoya Corporation

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Publication

Featured researches published by Yasutaka Tochihara.

Archive | 2005

Method of determining a flatness of an electronic device substrate, method of producing the substrate, method of producing a mask blank, method of producing a transfer mask, polishing method, electronic device substrate, mask blank, transfer mask, and polishing apparatus

Kesahiro Koike; Masato Ohtsuka; Yasutaka Tochihara

Archive | 2003

SUBSTRATE FOR ELECTRONIC DEVICE, MASK BLANK USING THE SAME, MASK FOR TRANSFER, METHOD FOR PRODUCING THESE, POLISHING APPARATUS AND POLISHING METHOD

Kesahiro Koike; Masahito Otsuka; Yasutaka Tochihara; 大塚 聖人; 小池 今朝広; 栃原 康孝

Archive | 2005

Manufacturing method for mask blank substrate, mask blank and transfer mask

Kesahiro Koike; Masahito Otsuka; Yasutaka Tochihara; 聖人 大塚; 今朝広 小池; 康孝 栃原

Archive | 2005

Glass substrate for mask blank, mask blank, method for producing glass substrate for mask blank, and polishing device

Kesahiro Koike; Yasutaka Tochihara; 今朝広 小池; 康孝 栃原

Archive | 2003

Method for determining flatness of substrate for electronic device, production method and method for producing mask blank and mask for transfer

Kesahiro Koike; Yasutaka Tochihara; 小池 今朝広; 栃原 康孝

Archive | 2007

フォトマスクブランク用基板及びその製造方法、フォトマスクブランク、並びにフォトマスク

Kesahiro Koike; Masaru Mitsui; Yasutaka Tochihara; 勝 三井; 今朝広 小池; 康孝 栃原

Archive | 2005

マスクブランク用基板、マスクブランク、および転写用マスク

Kesahiro Koike; Masahito Otsuka; Yasutaka Tochihara; 聖人 大塚; 今朝広 小池; 康孝 栃原

Archive | 2005

マスクブランク用のガラス基板、マスクブランク、マスクブランク用のガラス基板の製造方法、及び研磨装置。

Kesahiro Koike; Yasutaka Tochihara; 今朝広 小池; 康孝 栃原

Archive | 2003

A method of determining a flatness of a substrate for electronic components, process for the preparation of the substrate, method for the production of a mask blank, method of manufacturing a transfer mask, polishing process, a substrate for electronic components, mask blank transfer mask and polishing apparatus

Kesahiro Koike; Masato Ohtsuka; Yasutaka Tochihara

Archive | 2003

Verfahren zur Herstellung eines Maskenrohlings, Verfahren zur Herstellung einer Transfermaske A method of producing a mask blank, method of manufacturing a transfer mask

Kesahiro Koike; Masato Ohtsuka; Yasutaka Tochihara

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Kesahiro Koike

Hoya Corporation

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Masato Ohtsuka

Hoya Corporation

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