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Yen-Kun Victor Wang

Applied Materials

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Publication

Featured researches published by Yen-Kun Victor Wang.

Archive | 2005

gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials

Nitin K. Ingle; Shan Wong; Xinyun Xia; Vikash Banthia; Won B. Bang; Yen-Kun Victor Wang

Archive | 1998

Apparatus and method for depositing low K dielectric materials

Yeh-Jen Kao; Fong M. Chang; Robert B. Majewski; John Parks; David Wanamaker; Yen-Kun Victor Wang

Archive | 1997

Liquid flow rate estimation and verification by direct liquid measurement

Yen-Kun Victor Wang; Fong Chang; Thanh Pham; Jeff Plante

Archive | 2004

Gap-fill depositions in the formation of silicon containing dielectric materials

Nitin K. Ingle; Shan Wong; Xinyun Xia; Vikash Banthia; Won B. Bang; Yen-Kun Victor Wang; Zheng Yuan

Archive | 2002

Clog resistant gas delivery system

Won B. Bang; Yen-Kun Victor Wang; Steve Ghanayem

Archive | 2002

Bypass set up for integration of remote optical endpoint for CVD chamber

Wendy Ng; Toan Tran; Yen-Kun Victor Wang

Archive | 1997

In-situ liquid flow rate estimation and verification by sonic flow method

Visweswaren Sivaramakrishnan; Yen-Kun Victor Wang; Fong Chang; Thanh Pham; Jeff Plante

Archive | 2003

In-situ health check of liquid injection vaporizer

Toan Tran; Yen-Kun Victor Wang; Steve Ghanayem; Sean Herbert; Won B. Bang

Archive | 2001

LOW PROFILE THICK FILM HEATERS IN MULTI-SLOT BAKE CHAMBER

Yen-Kun Victor Wang; Mark Fodor; Chen-An Chen; Himanshu Pokharna; Son T. Nguyen; Kelly Fong; Inna Shmurun

Archive | 2003

Lift pin assembly for substrate processing

Toan Q. Tran; Daniel S. Herkalo; Yen-Kun Victor Wang; Jin Ho Lee; Dong Hyung Lee; Jang Seok Oh; Won B. Bang

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Won B. Bang

Applied Materials

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David Wanamaker

Applied Materials

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Fong Chang

Applied Materials

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Fong M. Chang

Applied Materials

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Jeff Plante

Applied Materials

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John Parks

Applied Materials

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Nitin K. Ingle

Applied Materials

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Robert B. Majewski

Applied Materials

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Shan Wong

Applied Materials

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Steve Ghanayem

Applied Materials

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