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Ying-Lang Wang

TSMC

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Publication

Featured researches published by Ying-Lang Wang.

Archive | 2000

Methods to improve copper-fluorinated silica glass interconnects

Jane-Bai Lai; Chung-Shi Liu; Tien-I Bao; Syun-Ming Jang; Chung-Long Chang; Hui-Ling Wang; Szu-An Wu; Wen-Kung Cheng; Chun-Ching Tsan; Ying-Lang Wang

Archive | 1998

Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer

Chun-Ching Tsan; Ying-Lang Wang; Hui-Ling Wang; Chin Kun Lan

Archive | 2003

Method for reducing defects in post passivation interconnect process

Hsi-Kuei Cheng; Hung-Ju Chien; Hsun-Chang Chan; Chu-Chang Chen; Ying-Lang Wang; Chin-Hao Su; Hsien-Ping Feng; Shih-Tzung Chang

Archive | 2002

Removal of SiON residue after CMP

Kei-Wei Chen; Kuo-Hsiu Wei; Yu-Kin Lin; Ting-Chun Wang; Ying-Lang Wang; Shih-Tzung Chang

Archive | 1999

Obtaining the better defect performance of the fuse CMP process by adding slurry polish on more soft pad after slurry polish

Hui-Ling Wang; Tong-Hua Kuan; Ying-Lang Wang; Yu-Ku Lin

Archive | 2002

Use of a capping layer to reduce particle evolution during sputter pre-clean procedures

Tao Cheng; Wen-Hsin Huang; Jiun-Pyng You; Lin-June Wu; Shih-Tzung Chang; Ming-Jei Lee; Chun-Chang Chen; Yu-Ku Lin; Tong-Hua Kuan; Ying-Lang Wang

Archive | 2002

Method and system for slurry usage reduction in chemical mechanical polishing

Kei-Wei Chen; Ting-Chun Wang; Shih-Tzung Chang; Yu-Ku Lin; Ying-Lang Wang; Ming-Wen Chen; Kuo-Hsiu Wei

Archive | 2001

Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing

Ting-Chun Wang; Kei-Wei Chen; Shih-Tzung Chang; Yu-Ku Lin; Ying-Lang Wang

Archive | 2000

Planarization of shallow trench isolation (STI)

Chin Kun Lan; Ting Chun Wang; Tong-Hua Kuan; Ying-Lang Wang

Archive | 2003

Catch-pin water support for process chamber

Hsi-Kuei Cheng; Chun-Tse Lin; Ting-Chun Wang; Yu-Ku Lin; Ying-Lang Wang

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Collaboration

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Shih-Tzung Chang

TSMC

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Yu-Ku Lin

TSMC

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Ting-Chun Wang

TSMC

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Hsi-Kuei Cheng

TSMC

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Hui-Ling Wang

TSMC

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Kei-Wei Chen

TSMC

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Tong-Hua Kuan

TSMC

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Chin-Hao Su

TSMC

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Chu-Chang Chen

TSMC

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Chun-Ching Tsan

TSMC

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