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Dive into the research topics where Kei-Wei Chen is active.

Publication


Featured researches published by Kei-Wei Chen.


Archive | 2005

Via structure and process for forming the same

Jung-Chih Tsao; Kei-Wei Chen; Ying-Jing Lu; Yu-Sheng Wang; Yu-Ku Lin


Archive | 2004

Method of forming barrier layer with reduced resistivity and improved reliability in copper damascene process

Kei-Wei Chen; Jung-Chih Tsao; Chi-Wen Liu; Jchung-Chang Chen; Shih-Tzung Chang; Shih-Ho Lin; Yu-Ku Lin; Ying-Lang Wang


Archive | 2004

Test device and method for laser alignment calibration

Shih-Tzung Chang; Yu-Ku Lin; Shih-Ho Lin; Kei-Wei Chen; Ting-Chun Wang; Ching-hwan Su; Ying-Lang Wang


Archive | 2002

Removal of SiON residue after CMP

Kei-Wei Chen; Kuo-Hsiu Wei; Yu-Kin Lin; Ting-Chun Wang; Ying-Lang Wang; Shih-Tzung Chang


Archive | 2004

Electropolishing method for removing particles from wafer surface

Shih-Ho Lin; Chung-Chang Chen; Kei-Wei Chen; Shih-Tzung Chang; Chao-Lung Chen; Po-Jen Shih; Yu-Ku Lin; Ying-Lang Wang


Archive | 2004

Novel ECP method for preventing the formation of voids and contamination in vias

Kei-Wei Chen; Shih-Ho Lin; Chun-Chang Chen; Ching-hwan Su; Yu-Ku Lin; Ying-Lang Wang; De-dui Marvin Liao; Meng-chao Tzeng


Archive | 2002

Method and system for slurry usage reduction in chemical mechanical polishing

Kei-Wei Chen; Ting-Chun Wang; Shih-Tzung Chang; Yu-Ku Lin; Ying-Lang Wang; Ming-Wen Chen; Kuo-Hsiu Wei


Archive | 2001

Method for improving thickness uniformity on a semiconductor wafer during chemical mechanical polishing

Ting-Chun Wang; Kei-Wei Chen; Shih-Tzung Chang; Yu-Ku Lin; Ying-Lang Wang


Archive | 2013

System and Method for Processing a Backside Illuminated Photodiode

Shiu-Ko Jangjian; Kei-Wei Chen; Chi-Cherng Jeng; Min Hao Hong


Archive | 2012

BSI Image Sensor Chips and Methods for Forming the Same

Shiu-Ko Jangjian; Kei-Wei Chen; Ying-Lang Wang

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