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Yohei Yamazawa

Tokyo Electron

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Publication

Featured researches published by Yohei Yamazawa.

Archive | 2007

Method and apparatus for measuring electron density of plasma and plasma processing apparatus

Naoki Matsumoto; Yohei Yamazawa; Chishio Koshimizu; Tatsuo Matsudo; Sumie Segawa

Archive | 2001

Method of detecting etching depth

Yohei Yamazawa; Yoshihito Ookawa

Archive | 2007

Substrate processing apparatus, deposit monitoring apparatus, and deposit monitoring method

Yohei Yamazawa; Tatsuo Matsudo

Archive | 2008

METHOD AND APPARATUS FOR INSPECTING PROCESS PERFORMANCE FOR USE IN A PLASMA PROCESSING APPARATUS

Yohei Yamazawa

Archive | 2013

FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMATION METHOD

Jun Yamawaku; Chishio Koshimizu; Yohei Yamazawa; Mitsuhiro Tachibana; Hitoshi Kato; Takeshi Kobayashi; Shigehiro Miura; Takafumi Kimura

Archive | 2012

CLEANING SUBSTRATE AND CLEANING METHOD

Yohei Yamazawa; Hiroshi Nagaike; Masashi Saito; Masanobu Honda

Archive | 2009

Plasma processing apparatus having impedance varying electrodes

Yohei Yamazawa

Archive | 2012

Substrate removing method and storage medium

Jun Yamawaku; Yohei Yamazawa

Archive | 2010

Plasma processing apparatus with filter circuit

Yohei Yamazawa

Archive | 2007

PLASMA PROCESSING APPARATUS AND METHOD OF MEASURING AMOUNT OF RADIO-FREQUENCY CURRENT IN PLASMA

Yohei Yamazawa

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Collaboration

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Chishio Koshimizu

Tokyo Electron

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Jun Yamawaku

Tokyo Electron

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Takafumi Kimura

Tokyo Electron

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Tatsuo Matsudo

Tokyo Electron

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Hiroshi Nagaike

Tokyo Electron

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Hitoshi Kato

Tokyo Electron

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Masanobu Honda

Tokyo Electron

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Masashi Saito

Tokyo Electron

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Mitsuhiro Tachibana

Tokyo Electron

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Naoki Matsumoto

Tokyo Electron

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