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Yoshiaki Tanase

Applied Materials

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Publication

Featured researches published by Yoshiaki Tanase.

Archive | 1994

Focus ring for semiconductor wafer processing in a plasma reactor

Graham W. Hills; Yuh-Jia Su; Yoshiaki Tanase; Robert E. Ryan

Archive | 2005

Controllable target cooling

Yoshiaki Tanase; Makoto Inagawa; Akihiro Hosokawa

Archive | 2005

Electron beam welding of sputtering target tiles

Yoshiaki Tanase; Akihiro Hosokawa

Archive | 2004

Curved slit valve door

Yoshiaki Tanase; Billy C. Leung; Gregory S. Lewis; David E. Berkstresser

Archive | 2004

Slit valve door seal

Yoshiaki Tanase; William N. Sterling; Paul Andrew Haworth

Archive | 2005

Methods and apparatus for sealing a chamber

John M. White; Shinichi Kurita; William N. Sterling; Yoshiaki Tanase

Archive | 2012

Target Cooling Through Gun Drilled Holes

Yoshiaki Tanase; Makoto Inagawa; Akihiro Hosokawa

Archive | 2007

Large area substrate transferring method for aligning with horizontal actuation of lever arm

Shinichi Kurita; Wendell T. Blonigan; Yoshiaki Tanase

Archive | 2006

ELECTRON BEAM WELDING FOR SPUTTERING TARGET TILE

Akihiro Hosokawa; Yoshiaki Tanase; タナセ ヨシアキ; 昭弘 細川

Archive | 2005

Method and device for sealing chamber

M White John; Shinichi Kurita; William N. Sterling; Yoshiaki Tanase; エヌ． スターリング ウイリアム; エム． ホワイト ジョン; クリタ シンイチ; タナセ ヨシアキ

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Collaboration

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Akihiro Hosokawa

Applied Materials

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Shinichi Kurita

Applied Materials

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William N. Sterling

Applied Materials

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Makoto Inagawa

Applied Materials

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Wendell T. Blonigan

Applied Materials

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Billy C. Leung

Applied Materials

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David E. Berkstresser

Applied Materials

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Graham W. Hills

Applied Materials

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Gregory S. Lewis

Applied Materials

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John M. White

Applied Materials

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