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Yoshihumi Takeda

Shin-Etsu Chemical

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Publication

Featured researches published by Yoshihumi Takeda.

Archive | 2000

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Satoshi Watanabe; Osamu Watanabe; Tomoyoshi Furihata; Yoshihumi Takeda; Shigehiro Nagura; Toshinobu Ishihara; Tsuguo Yamaoka

Archive | 1998

Polymers and chemically amplified positive resist compositions

Osamu Watanabe; Yoshihumi Takeda; Junji Tsuchiya; Toshinobu Ishihara

Archive | 1988

Process for manufacturing organic silazane polymers and ceramics therefrom

Yoshihumi Takeda; Minoru Takamizawa; Akira Hayashida

Archive | 1984

Method for the preparation of an inorganic fiber containing silicon, carbon, boron and nitrogen

Minoru Takamizawa; Taishi Kobayashi; Akira Hayashida; Yoshihumi Takeda

Archive | 1997

Anti-reflective coating composition

Satoshi Watanabe; Toshinobu Ishihara; Ichiro Shin-Etsu Chemical Co. Ltd. Kaneko; Katsuyuki Oikawa; Yoshihumi Takeda

Archive | 1996

Resist composition with polymeric dissolution inhibitor and alkali soluble resin

Katsuya Takemura; Toshinobu Ishihara; Kazumasa Maruyama; Yoshihumi Takeda; Minoru Shigemitsu; Kenichi Itoh

Archive | 1988

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

Minoru Takamizawa; Mitsuo Umemura; Masato Kanari; Yoshihumi Takeda; Akira Hayashida

Archive | 1995

Water-soluble film forming composition

Satoshi Watanabe; Toshinobu Ishihara; Yoshihumi Takeda; Katsuyuki Oikawa

Archive | 1985

Precursor composition of silicon carbide

Minoru Takamizawa; Taishi Kobayashi; Toshinobu Ishihara; Yoshihumi Takeda; Akira Hayashida

Archive | 1984

Organoborosilicon polymer and a method for the preparation thereof

Minoru Takamizawa; Taishi Kobayashi; Akira Hayashida; Yoshihumi Takeda

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Collaboration

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Akira Hayashida

Shin-Etsu Chemical

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Minoru Takamizawa

Shin-Etsu Chemical

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Toshinobu Ishihara

East Tennessee State University

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Taishi Kobayashi

Shin-Etsu Chemical

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Satoshi Watanabe

Shin-Etsu Chemical

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Toshinobu Ishihara

East Tennessee State University

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Katsuya Takemura

Panasonic

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Kazumasa Maruyama

Shin-Etsu Chemical

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Masato Kanari

Shin-Etsu Chemical

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Mitsuo Umemura

Shin-Etsu Chemical

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