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Katsuya Takemura

Shin-Etsu Chemical

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Publication

Featured researches published by Katsuya Takemura.

Archive | 2006

Resist protective coating material and patterning process

Jun Hatakeyama; Katsuya Takemura

Archive | 1996

Sulfonium salts and chemically amplified positive resist compositions

Yoichi Osawa; Satoshi Watanabe; Katsuya Takemura; Shigehiro Nagura; Akinobu Tanaka; Yoshio Kawai

Archive | 1996

Chemically amplified positive resist compositions

Katsuya Takemura; Junji Tsuchiya; Toshinobu Ishihara

Archive | 2009

Double patterning process

Katsuya Takemura; Tsunehiro Nishi; Jun Hatakeyama; Masaki Ohashi; Takeshi Kinsho

Archive | 1996

Polysiloxane compounds and positive resist compositions

Katsuya Takemura; Junji Tsuchiya; Osamu Watanabe; Toshinobu Ishihara

Archive | 2001

Chemically amplified positive resist composition and patterning method

Takanobu Takeda; Jun Shin-Etsu Chemical Co. Ltd. Watanabe; Katsuya Takemura; Kenji Koizumi

Archive | 2012

Chemically amplified positive resist composition and patterning process

Hiroyuki Yasuda; Katsuya Takemura

Archive | 2004

Positive resist material and pattern formation method using the same

Yoshitaka Hamada; Fujio Yagihashi; Mutsuo Nakashima; Kazumi Noda; Katsuya Takemura

Archive | 1996

Resist composition with polymeric dissolution inhibitor and alkali soluble resin

Katsuya Takemura; Toshinobu Ishihara; Kazumasa Maruyama; Yoshihumi Takeda; Minoru Shigemitsu; Kenichi Itoh

Archive | 2014

NAPHTHALENE DERIVATIVE, RESIST BOTTOM LAYER MATERIAL, AND PATTERNING PROCESS

Takeshi Kinsho; Daisuke Kori; Katsuya Takemura; Takeru Watanabe; Tsutomu Ogihara

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Collaboration

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Hiroyuki Urano

Shin-Etsu Chemical

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Toshinobu Ishihara

Shin-Etsu Chemical

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Satoshi Watanabe

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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Kazumasa Maruyama

Shin-Etsu Chemical

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Masashi Iio

Shin-Etsu Chemical

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Takeshi Kinsho

Shin-Etsu Chemical

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Daisuke Kori

Shin-Etsu Chemical

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Takashi Miyazaki

Shin-Etsu Chemical

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Tsutomu Ogihara

Shin-Etsu Chemical

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