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Dive into the research topics where Katsuya Takemura is active.

Publication


Featured researches published by Katsuya Takemura.


Archive | 2006

Resist protective coating material and patterning process

Jun Hatakeyama; Katsuya Takemura


Archive | 1996

Sulfonium salts and chemically amplified positive resist compositions

Yoichi Osawa; Satoshi Watanabe; Katsuya Takemura; Shigehiro Nagura; Akinobu Tanaka; Yoshio Kawai


Archive | 1996

Chemically amplified positive resist compositions

Katsuya Takemura; Junji Tsuchiya; Toshinobu Ishihara


Archive | 2009

Double patterning process

Katsuya Takemura; Tsunehiro Nishi; Jun Hatakeyama; Masaki Ohashi; Takeshi Kinsho


Archive | 1996

Polysiloxane compounds and positive resist compositions

Katsuya Takemura; Junji Tsuchiya; Osamu Watanabe; Toshinobu Ishihara


Archive | 2001

Chemically amplified positive resist composition and patterning method

Takanobu Takeda; Jun Shin-Etsu Chemical Co. Ltd. Watanabe; Katsuya Takemura; Kenji Koizumi


Archive | 2012

Chemically amplified positive resist composition and patterning process

Hiroyuki Yasuda; Katsuya Takemura


Archive | 2004

Positive resist material and pattern formation method using the same

Yoshitaka Hamada; Fujio Yagihashi; Mutsuo Nakashima; Kazumi Noda; Katsuya Takemura


Archive | 1996

Resist composition with polymeric dissolution inhibitor and alkali soluble resin

Katsuya Takemura; Toshinobu Ishihara; Kazumasa Maruyama; Yoshihumi Takeda; Minoru Shigemitsu; Kenichi Itoh


Archive | 2014

NAPHTHALENE DERIVATIVE, RESIST BOTTOM LAYER MATERIAL, AND PATTERNING PROCESS

Takeshi Kinsho; Daisuke Kori; Katsuya Takemura; Takeru Watanabe; Tsutomu Ogihara

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