Yoshimi Egawa
Oki Electric Industry
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Yoshimi Egawa.
international electron devices meeting | 2006
Masaya Kawano; S. Uchiyama; Yoshimi Egawa; N. Takahashi; Y. Kurita; Koji Soejima; M. Komuro; S. Matsui; K. Shibata; J. Yamada; M. Ishino; H. Ikeda; Yoshihiro Saeki; Osamu Kato; Hidekazu Kikuchi; Toshiro Mitsuhashi
A 3D packaging technology has been developed for 4 Gbit DRAM. Highly-doped poly-Si through-silicon vias (TSVs) are used for vertical traces inside silicon and interconnection between DRAM chips to realize a DRAM compatible process. Through optimization of the process conditions and layout design, fast poly-Si filling has been obtained. The entire packaging was carried out at the wafer level by using the so-called SMAFTI technology. A new bump and wiring structure for feedthrough interposer (FTI) has also been developed for fine-pitch and low-cost bonding. Simulation of the transfer function of FTI wiring indicated a 3 Gbps/pin data transfer capability
electronic components and technology conference | 2007
Yoichiro Kurita; Satoshi Matsui; Nobuaki Takahashi; Koji Soejima; Masahiro Komuro; Makoto Itou; Chika Kakegawa; Masaya Kawano; Yoshimi Egawa; Yoshihiro Saeki; Hidekazu Kikuchi; Osamu Kato; Azusa Yanagisawa; Toshiro Mitsuhashi; Masakazu Ishino; Kayoko Shibata; Shiro Uchiyama; Junji Yamada; Hiroaki Ikeda
Archive | 2004
Yoshimi Egawa
Archive | 1998
Shinji Ohuchi; Yoshimi Egawa; Noritaka Anzai
MRS Proceedings | 2006
Toshiro Mitsuhashi; Yoshimi Egawa; Osamu Kato; Yoshihiro Saeki; Hidekazu Kikuchi; Shiro Uchiyama; Kayoko Shibata; Junji Yamada; Masakazu Ishino; Hiroaki Ikeda; Nobuaki Takahashi; Yoichiro Kurita; Masahiro Komuro; Satoshi Matsui; Masaya Kawano
Archive | 2006
Yoshimi Egawa
Archive | 2000
Yoshimi Egawa; Kazumi Shinchi; Takeshi Niigaki
Archive | 2006
Yoshimi Egawa
Archive | 2003
Yoshimi Egawa; Kazumi Shinchi; Takeshi Niigaki
Archive | 1998
Shinji Ohuchi; Yoshimi Egawa