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Young-min Min

Samsung

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Publication

Featured researches published by Young-min Min.

Archive | 2002

Method of and an apparatus for regulating the temperature of an electrostatic chuck

Jin-Man Kim; Yun-sik Yang; Sang-jun Chun; Young-min Min

Archive | 2003

Method for generating gas plasma

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2001

RF matching unit

Dae-Kyu Choi; Young-min Min; Sang-mun Chon; Yun-sik Yang; Jin-Man Kim

Archive | 2009

Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2007

Semiconductor etching apparatus

Jin-Man Kim; Yun-sik Yang; Young-min Min; Sang-Ho Kim

Archive | 1999

Plasma apparatus for fabricating semiconductor devices

Kiw-sang Suwon Kim; Young-min Min; In-Sung Park

Archive | 2008

Methods and apparatus for semiconductor etching including an electro static chuck

Jin-Man Kim; Yun-sik Yang; Young-min Min; Sang-Ho Kim

Archive | 2002

Input/output valve switching apparatus of semiconductor manufacturing system

Yun-sik Yang; Jin-Man Kim; Young-min Min; Chang-Hyun Jo

Archive | 2003

Method and device for gas plasma production, gas composition for plasma production, and semiconductor device manufacturing method utilizing it

道 仁 ▲はい▼; Do-In Bae; Dae-Kyu Choi; Wan-Goo Hwang; Chinman Kin; Young-min Min; Junshoku Yo

Archive | 2001

Hochfrequenz-Anpassungseinheit RF matching unit

Dae-Kyu Choi; Sang-mun Chon; Jin-Man Songpa Kim; Young-min Min; Yun-sik Yang

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Collaboration

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Yun-sik Yang

Samsung

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Jin-Man Kim

Samsung

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Dae-Kyu Choi

Samsung

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Do-In Bae

Samsung

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In-Sung Park

Samsung

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Kiw-sang Suwon Kim

Samsung

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Wan-Goo Hwang

Samsung

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Sang-Ho Kim

Samsung

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