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Yun-sik Yang

Samsung

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Publication

Featured researches published by Yun-sik Yang.

Archive | 1998

Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers

Yun-sik Yang; Hun Cha; Seung-ki Chae

Archive | 2000

Focus ring and apparatus for processing a semiconductor wafer comprising the same

Oh-Yeon Han; Guk-Kwang Kim; Yun-sik Yang; Byeung-wook Choi

Archive | 2002

Method of and an apparatus for regulating the temperature of an electrostatic chuck

Jin-Man Kim; Yun-sik Yang; Sang-jun Chun; Young-min Min

Archive | 2002

Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus

Yun-sik Yang; Kyung-dae Kim; Hyung-sik Hong; Min-Gyu Kim

Archive | 2003

Method for generating gas plasma

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2001

RF matching unit

Dae-Kyu Choi; Young-min Min; Sang-mun Chon; Yun-sik Yang; Jin-Man Kim

Archive | 2009

Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2004

Plasma chemical vapor deposition apparatus having an improved nozzle configuration

Ahn-Sik Moon; Yun-sik Yang; Jae-Hyun Han; Joo-Pyo Hong; Seung-ki Chae; In-Cheol Lee; Jong-Koo Lee; Dae-Hyun Kim

Archive | 2004

Substrate manufacturing apparatus and substrate transfer module used therein

Ki-sang Kim; Seung-ki Chae; Yun-sik Yang; Seong-Hun Jeon

Archive | 2007

PHOTOLITHOGRAPHY SYSTEM AND METHOD

Byong-Cheol Park; Dong-Hwa Shin; Yun-sik Yang

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Young-min Min

Samsung

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Jin-Man Kim

Samsung

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Dae-Kyu Choi

Samsung

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Seung-ki Chae

Samsung

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Do-In Bae

Samsung

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Heok-Jae Lee

Samsung

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Hun Cha

Samsung

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Kyung-dae Kim

Samsung

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Min-Gyu Kim

Samsung

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Sang-Ho Kim

Samsung

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