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Wan-Goo Hwang

Samsung

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Publication

Featured researches published by Wan-Goo Hwang.

Archive | 2005

Methods and apparatus for forming a titanium nitride layer

Wan-Goo Hwang; Myeong-Jin Kim; Seung-ki Chae; Hyun-Seok Lim; Kyoung-Ho Jang

Archive | 2003

Method for generating gas plasma

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2009

Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same

Young-min Min; Dae-Kyu Choi; Do-In Bae; Yun-sik Yang; Wan-Goo Hwang; Jin-Man Kim

Archive | 2006

Apparatus for supplying gas and apparatus for forming a layer having the same

Wan-Goo Hwang; Seung-ki Chae; Myeong-Jin Kim; Seoung-Chang Baek; Sung-wook Park; Un-Chan Baek; Hyun Wook Lee; Kyoung-Ho Jang; Seong-Ju Choi; Il-kyoung Kim

Archive | 2011

SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING THIN LAYER USING THE SAME

Youngkyou Park; Jeong-soo Suh; Wan-Goo Hwang; Hoonsang Choi; Jongrok Park

Archive | 2006

Method of forming layers on substrates using microwave energy and apparatus for performing the same

Wan-Goo Hwang; Seung-ki Chae; Myeong-Jin Kim; Kyoung-Ho Jang

Archive | 2007

Method for forming a thin layer on semiconductor substrates

Hyun Wook Lee; Wan-Goo Hwang; Bu-Cheul Lee; Jeong-soo Suh; Sung-Il Han; Seong-Ju Choi

Archive | 2006

Method of cleaning plasma applicator in situ and plasma applicator employing the same

Wan-Goo Hwang; No-Hyun Huh; Il-kyoung Kim; Jeong-soo Suh; Ki-Young Yun

Archive | 2007

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT

Il-kyoung Kim; Kwang-Myung Lee; No-Hyun Huh; Wan-Goo Hwang; Ki-Young Yun

Archive | 2005

Method of manufacturing a hemisperical grain silicon layer and method of manufacturing a semiconductor device using the same

Young-Jin Kim; Hyeon-deok Lee; Seok-Woo Nam; Yongjae Lee; Hyun-Seok Lim; Wan-Goo Hwang; Jin-Il Lee; Jung-Hwan Oh

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Collaboration

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Jeong-soo Suh

Samsung

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Do-In Bae

Samsung

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Hyun Wook Lee

Samsung

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Myeong-Jin Kim

Samsung

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Dae-Kyu Choi

Samsung

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Il-kyoung Kim

Samsung

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Kyoung-Ho Jang

Samsung

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No-Hyun Huh

Samsung

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Seong-Ju Choi

Samsung

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Seung-ki Chae

Samsung

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