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Yu Chao Lin

TSMC

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Publication

Featured researches published by Yu Chao Lin.

Archive | 2009

Methods of fabricating high-k metal gate devices

Yih-Ann Lin; Ryan Chia-Jen Chen; Chien-Hao Chen; Kuo-Tai Huang; Yi-Hsing Chen; Jr Jung Lin; Yu Chao Lin

Archive | 2013

FinFET device structure and methods of making same

Yu Chao Lin; Cheng-Han Wu; Eric Chih-Fang Liu; Ryan Chia-Jen Chen; Chao-Cheng Chen

Archive | 2009

NOVEL HIGH-K METAL GATE CMOS PATTERNING METHOD

Kong-Beng Thei; Harry Chuang; Ryan Chia-Jen Chen; Su-Chen Lai; Yi-Shien Mor; Yi-Hsing Chen; Gary Shen; Yu Chao Lin

Archive | 2011

Patterning Methodology for Uniformity Control

Yu Chao Lin; Ming-Ching Chang; Yih-Ann Lin; Ryan Chia-Jen Chen; Chao-Cheng Chen

Archive | 2009

N2 based plasma treatment and ash for hk metal gate protection

Yu Chao Lin; Ryan Chia-Jen Chen; Yih-Ann Lin; Jr Jung Lin

Archive | 2009

Method of reducing a critical dimension of a semiconductor device

Yu Chao Lin; De-Fang Chen; Chia-Wei Chang; Yih-Ann Lin; Chao-Cheng Chen; Ryan Chia-Jen Chen; Weng Cheng

Archive | 2012

Finfets and method of fabricating the same

Yu Chao Lin; Chih-tang Peng; Shun-Hui Yang; Ryan Chia-Jen Chen; Chao-Cheng Chen

Archive | 2014

METHOD OF FABRICATING FINFETS

Yu Chao Lin; Chih-tang Peng; Shun-Hui Yang; Ryan Chia-Jen Chen; Chao-Cheng Chen

Archive | 2010

SEALING LAYER OF A FIELD EFFECT TRANSISTOR

Yu Chao Lin; Jr Jung Lin; Yih-Ann Lin; Jih-Jse Lin; Chao-Cheng Chen; Ryan Chia-Jen Chen; Weng Chang

Archive | 2009

High-k metal gate CMOS patterning method

Kong-Beng Thei; Harry Chuang; Ryan Chia-Jen Chen; Su-Chen Lai; Yi-Shien Mor; Yi-Hsing Chen; Gary Shen; Yu Chao Lin

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Collaboration

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Ryan Chia-Jen Chen

TSMC

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Chao-Cheng Chen

TSMC

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Yih-Ann Lin

TSMC

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Jr Jung Lin

TSMC

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Ming-Ching Chang

TSMC

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Shun-Hui Yang

TSMC

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Yi-Hsing Chen

TSMC

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Chih-tang Peng

TSMC

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Gary Shen

TSMC

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Harry Chuang

TSMC

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