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Yih-Ann Lin

TSMC

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Publication

Featured researches published by Yih-Ann Lin.

Archive | 2009

Methods of fabricating high-k metal gate devices

Yih-Ann Lin; Ryan Chia-Jen Chen; Chien-Hao Chen; Kuo-Tai Huang; Yi-Hsing Chen; Jr Jung Lin; Yu Chao Lin

Archive | 2011

Method of forming an integrated circuit

Tzu-Yen Hsieh; Chang Ming-Ching; Chun-Hung Lee; Yih-Ann Lin; De-Fang Chen; Chao-Cheng Chen

Archive | 2011

Patterning Methodology for Uniformity Control

Yu Chao Lin; Ming-Ching Chang; Yih-Ann Lin; Ryan Chia-Jen Chen; Chao-Cheng Chen

Archive | 2009

N2 based plasma treatment and ash for hk metal gate protection

Yu Chao Lin; Ryan Chia-Jen Chen; Yih-Ann Lin; Jr Jung Lin

Archive | 2009

METHOD OF INTEGRATING HIGH-K/METAL GATE IN CMOS PROCESS FLOW

Ryan Chia-Jen Chen; Yih-Ann Lin; Jr Jung Lin; Yi-Shien Mor; Chien-Hao Chen; Kuo-Tai Huang; Yi-Hsing Chen

Archive | 2009

Method of reducing a critical dimension of a semiconductor device

Yu Chao Lin; De-Fang Chen; Chia-Wei Chang; Yih-Ann Lin; Chao-Cheng Chen; Ryan Chia-Jen Chen; Weng Cheng

Archive | 2009

METHOD OF FORMING A SINGLE METAL THAT PERFORMS N WORK FUNCTION AND P WORK FUNCTION IN A HIGH-K/METAL GATE PROCESS

Yih-Ann Lin; Ryan Chia-Jen Chen; Donald Y. Chao; Yi-Shien Mor; Kuo-Tai Huang

Archive | 2013

Integrated High-K/Metal Gate in CMOS Process Flow

Ryan Chia-Jen Chen; Yih-Ann Lin; Jr Jung Lin; Yi-Shien Mor; Chien-Hao Chen; Kuo-Tai Huang; Yi-Hsing Chen

Archive | 2008

Novel solution for polymer and capping layer removing with wet dipping in hk metal gate etching process

Jr Jung Lin; Yih-Ann Lin; Ryan Chia-Jen Chen

Archive | 2010

SEALING LAYER OF A FIELD EFFECT TRANSISTOR

Yu Chao Lin; Jr Jung Lin; Yih-Ann Lin; Jih-Jse Lin; Chao-Cheng Chen; Ryan Chia-Jen Chen; Weng Chang

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Ryan Chia-Jen Chen

TSMC

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Jr Jung Lin

TSMC

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Chao-Cheng Chen

TSMC

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Yu Chao Lin

TSMC

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Kuo-Tai Huang

TSMC

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Chien-Hao Chen

TSMC

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De-Fang Chen

TSMC

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Yi-Hsing Chen

TSMC

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Yi-Shien Mor

TSMC

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Chang Ming-Ching

TSMC

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