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Yu-Hua Lee

TSMC

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Publication

Featured researches published by Yu-Hua Lee.

Archive | 1998

Borderless dual damascene contact

Cheng-Yeh Shih; Yu-Hua Lee; James Wu

Archive | 1998

Process to fabricate a cylindrical, capacitor structure under a bit line structure for a dynamic random access memory cell

Yu-Hua Lee; Cheng-Ming Wu; Wen-Chuan Chiang

Archive | 1999

Self-aligned contact process for a crown shaped dynamic random access memory capacitor structure

Yu-Hua Lee; James Wu; Min-Hsiung Chiang

Archive | 1998

Method to form a recess free deep contact

Kuo Ching Huang; Wen-Chuan Chiang; Cheng-Ming Wu; Yu-Hua Lee

Archive | 1999

Method to form capacitance node contacts with improved isolation in a DRAM process

Yu-Hua Lee; James Wu; Wen-Chuan Chiang; Min-Hsiung Chiang

Archive | 1999

Method to evaluate hemisperical grain (HSG) polysilicon surface

Kuo-Ching Huang; Tse-Liang Ying; Wen-Chuan Chiang; Yu-Hua Lee

Archive | 2002

Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids

Ming-Hsiung Chiang; James Wu; Yu-Hua Lee

Archive | 1999

Node process integration technology to improve data retention for logic based embedded dram

Tse-Liang Ying; Wen-Chuan Chiang; Cheng-Ming Wu; Yu-Hua Lee

Archive | 1999

Method for making a double-cylinder-capacitor structure for dynamic random access memory (DRAM)

Kuo Ching Huang; Yu-Hua Lee; James Wu; Wen-Chuan Chiang

Archive | 1999

Process for forming a crown shaped capacitor structure for a DRAM device

Yu-Hua Lee; Cheng-Ming Wu; Wen-Chuan Chiang

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Collaboration

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Wen-Chuan Chiang

TSMC

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James Wu

TSMC

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Cheng-Ming Wu

TSMC

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Kuo Ching Huang

TSMC

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Min-Hsiung Chiang

TSMC

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Tse-Liang Ying

TSMC

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Cheng-Yeh Shih

TSMC

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Kuo-Ching Huang

TSMC

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Ming-Hsiung Chiang

TSMC

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Tze-Liang Ying

TSMC

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