James Wu

Borderless dual damascene contact

Capacitor structure for a dynamic random access memory cell

Method to form a protected metal fuse

Via array monitor and method of monitoring induced electrical charging

Method for improving chemical/mechanical polish uniformity over rough topography for semiconductor integrated circuits

Process to form a crown capacitor structure for a dynamic random access memory cell

Robust method of forming a cylinder capacitor for DRAM circuits

Self-aligned contact process for a crown shaped dynamic random access memory capacitor structure

Aperture width reduction method for forming a patterned photoresist layer

Method to form capacitance node contacts with improved isolation in a DRAM process