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W. Thomas Novak

Nikon

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Publication

Featured researches published by W. Thomas Novak.

Archive | 1994

Precision motion stage with single guide beam and follower stage

W. Thomas Novak; Zahirudeen Premji; Uday G. Nayak; Akimitsu Ebihara

Archive | 2004

Cleanup method for optics in immersion lithography

Andrew J. Hazelton; Hidemi Kawai; Douglas C. Watson; W. Thomas Novak

Archive | 2007

Environmental system including a transport region for an immersion lithography apparatus

W. Thomas Novak; Andrew J. Hazelton; Douglas C. Watson

Archive | 2005

Liquid jet and recovery system for immersion lithography

W. Thomas Novak; Andrew J. Hazelton; Douglas C. Watson

Archive | 2009

Optical arrangement of autofocus elements for use with immersion lithography

W. Thomas Novak

Archive | 2006

Adaptive-optics actuator arrays and methods for using such arrays

W. Thomas Novak

Archive | 1999

Kinematic lens mounting with distributed support and radial flexure

Douglas C. Watson; W. Thomas Novak

Archive | 2000

Wafer positioner with planar motor and mag-lev fine stage

Andrew J. Hazelton; W. Thomas Novak; Akimitsu Ebihara

Archive | 2000

Precision scanning apparatus and method with fixed and movable guide members

W. Thomas Novak; Zahirudeen Premji; Uday G. Nayak; Akimitsu Ebihara

Archive | 1998

Armature with regular windings and having a high conductor density

Andrew J. Hazelton; W. Thomas Novak

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Douglas C. Watson

Philips

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Andrew J. Hazelton

Nikon

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Daniel Gene Smith

Nikon

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Hidemi Kawai

Nikon

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Mark Takita

Nikon

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Michael B. Binnard

Nikon

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Akimitsu Ebihara

Nikon

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Bausan Yuan

Nikon

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Li Hong

Nikon

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Alexander Cooper

Nikon

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