W. Thomas Novak

Precision motion stage with single guide beam and follower stage

Cleanup method for optics in immersion lithography

Environmental system including a transport region for an immersion lithography apparatus

Liquid jet and recovery system for immersion lithography

Optical arrangement of autofocus elements for use with immersion lithography

Adaptive-optics actuator arrays and methods for using such arrays

Kinematic lens mounting with distributed support and radial flexure

Wafer positioner with planar motor and mag-lev fine stage

Precision scanning apparatus and method with fixed and movable guide members

Armature with regular windings and having a high conductor density