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Yumiko Kawano

Tokyo Electron

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Publication

Featured researches published by Yumiko Kawano.

Archive | 2014

Heat treatment apparatus

Tomihiro Yonenaga; Yumiko Kawano

Archive | 2000

CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed

Masami Mizukami; Takashi Mochizuki; Yumiko Kawano

Archive | 2001

Thin film forming method and thin film forming device

Hideaki Yamasaki; Yumiko Kawano

Archive | 2002

Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system

Hideaki Yamasaki; Yumiko Kawano; Kenichi Kubo; Susumu Arima

Archive | 2003

Film-formation apparatus and source supplying apparatus therefor, gas concentration measuring method

Hideaki Yamasaki; Yumiko Kawano

Archive | 1999

Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a cvd chamber

Joseph T. Hillman; Tugrul Yasar; Kenichi Kubo; Vincent Vezin; Hideaki Yamasaki; Yasuhiko Kojima; Yumiko Kawano; Hideki Yoshikawa

Archive | 1999

Semiconductor device fabricating method and system for carrying out the same

Hideaki Yamasaki; Satoshi Yonezawa; Susumu Arima; Yumiko Kawano; Mitsuhiro Tachibana; Keizo Hosoda

Archive | 2000

CVD apparatus and CVD method

Takeshi Kaizuka; Takashi Horiuchi; Masami Mizukami; Takashi Mochizuki; Yumiko Kawano; Hideaki Yamasaki

Archive | 2004

Method of forming an oxidation-resistant TiSiN film

Yukihiro Shimogaki; Yumiko Kawano

Archive | 2001

Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring

Hideaki Yamasaki; Mitsuhiro Tachibana; Kazuya Okubo; Kenji Suzuki; Yumiko Kawano

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Collaboration

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Hideaki Yamasaki

Tokyo Electron

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Susumu Arima

Tokyo Electron

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Akinobu Kakimoto

Tokyo Electron

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Kazuhito Nakamura

Tokyo Electron

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Gert J. Leusink

Tokyo Electron

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Mitsuhiro Tachibana

Tokyo Electron

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Takakazu Kiyomura

Tokyo Electron

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Toshiyuki Hirota

Tokyo Electron

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Takashi Mochizuki

Tokyo Electron

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Tatsuo Hatano

Tokyo Electron

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