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Akinobu Kakimoto

Tokyo Electron

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Publication

Featured researches published by Akinobu Kakimoto.

Archive | 2011

FILM FORMATION APPARATUS

Akinobu Kakimoto; Katsuhiko Komori; Kazuhide Hasebe

Archive | 2012

Film deposition method and film deposition apparatus

Akinobu Kakimoto; Satoshi Takagi; Toshiyuki Ikeuchi; Katsuhiko Komori; Kazuhide Hasebe

Archive | 2011

METHOD AND DEVICE FOR FORMING AMORPHOUS SILICON FILM

Kazuhide Hasebe; Akinobu Kakimoto; Hiroki Murakami; 博紀 村上; 明修 柿本; 一秀 長谷部

Archive | 2015

Amorphous silicon film formation method and amorphous silicon film formation apparatus

Kazuhide Hasebe; Hiroki Murakami; Akinobu Kakimoto

Archive | 2007

Thin Film Capacitor, Method for Forming Same, and Computer Readable Recording Medium

Akinobu Kakimoto

Archive | 2012

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

Akinobu Kakimoto; Atsushi Endo; Takahiro Miyahara; Shigeru Nakajima; Satoshi Takagi; Kazumasa Igarashi

Archive | 2013

Method and apparatus for forming silicon film

Akinobu Kakimoto; Satoshi Takagi; Kazuhide Hasebe

Archive | 2014

METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM

Akinobu Kakimoto; Satoshi Takagi; Kazumasa Igarashi

Archive | 2013

METHOD OF FORMING SEED LAYER AND METHOD OF FORMING SILICON-CONTAINING THIN FILM

Mitsuhiro Okada; Akinobu Kakimoto; Kazuhide Hasebe

Archive | 2009

Method and device for cleaning a substrate and storage medium

Akitake Tamura; Akinobu Kakimoto; Kazuya Dobashi

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Collaboration

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Kazuhide Hasebe

Tokyo Electron

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Yumiko Kawano

Tokyo Electron

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Satoshi Takagi

Tokyo Electron

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Susumu Arima

Tokyo Electron

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Takakazu Kiyomura

Tokyo Electron

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Toshiyuki Hirota

Tokyo Electron

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Katsuhiko Komori

Tokyo Electron

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Mitsuhiro Okada

Tokyo Electron

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Satoshi Onodera

Tokyo Electron

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Atsushi Endo

Tokyo Electron

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