Yves Petremand

Micro-fabricated system for wavelengths monitoring

Presents a new design of a time-scanning Michelson interferometer realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology. The new design allows auto-calibration of the motion of the scanning mirror. The device is suitable for monitoring about 50 channels at the telecom wavelength (/spl lambda/=1.5/spl mu/m).

Optical Beam Steering Using a 2D MEMS Scanner

This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.

A 2D MEMS stage for optical applications

A 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50 μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion from linear 1D translation of two pairs of comb actuator sets. The device has a clear aperture of 2mm by 2mm, which is hallowed from the backside for micro-optics assembly. In this paper, a numerical device model and its validation via experimental characterization results are presented. Integration of the micro-optical components with the stage is also discussed. Additionally, a new driving scheme to minimize the settling time of the device in DC operation is explored.

Beam steering system using a 2D MEMS scanner

Fiber optical modules manufacturing have been recognized as a key challenge in meeting the anticipated demand for high bandwidth telecommunication equipment. Among all challenges, submicron optical alignment for single mode fiber remains the predominant difficulty [1]. To reduce the alignment effort during the assembly, a XY micro stage has been developed. It consists of a scanning platform with a mounted micro-lens on top (Figure 1). After a passive alignment of the components and the sealing of the package, a fine tuning of the lens position and thus the optical coupling efficiency can be made by actuating the MEMS chip.

Recent Developments in Silicon-based MEMS Photonic Systems

Silicon-based photonic MEMS modulate light by displacing microoptical elements such as micromirrors and microlenses. Recent development focus on fiber-laser couplers, multi-object spectrometers, and tunable cavities.

Micro-fabricated spectral analysers

We present several devices using different spectroscopic concepts. First, we show the successive steps and improvements in connection with the Michelson interferometer which we have already realized, in particular the use of fibers to bring in and collimate the light. A possible method to obtain micro-optical elements that are suitable for integration on the interferometer chip is proposed. Then, we present a lamellar grating interferometer, an array of commutable slits to realize a Hadamard transformer, and a movable curved diffraction grating. All of these devices have been realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology.