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Zhao Danqi

Peking University

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Publication

Featured researches published by Zhao Danqi.

Archive | 2013

Piezoresistive pressure sensor of MEMS (Micro-Electro-Mechanical Systems) and preparation method thereof

Huang Xian; Zhang Dacheng; Zhao Danqi; He Jun; Yang Fang; Tian Dayu; Liu Peng; Wang Wei; Li Ting; Luo Kui

Archive | 2013

Charge testing method in plasma environment and testing system

Zhao Danqi; Zhang Dacheng; Luo Kui; Wang Wei; Tian Dayu; Yang Fang; Liu Peng; Li Ting

Archive | 2012

Charge-detecting chip and manufacturing method thereof

Zhao Danqi; Zhang Dacheng; Luo Kui; Wang Wei; Tian Dayu; Yang Fang; Liu Peng; Li Ting

Archive | 2014

Method and apparatus for applying forces perpendicular to cantilever beam

He Jun; Zhang Dacheng; Zhao Danqi; Wang Wei; Yang Fang; Tian Dayu; Liu Peng; Li Ting; Luo Kui

Archive | 2014

MEMS (micro-electromechanical system) and IC (integrated circuit) monolithical integration method

Zhao Danqi; Zhang Dacheng; Lin Chen; He Jun; Yang Fang; Tian Dayu; Liu Peng; Wang Wei; Li Ting; Luo Kui

Archive | 2014

Method for detecting roughness of etched side walls through capacitance changes

Zhang Li; He Jun; Zhang Dacheng; Huang Xian; Zhao Danqi; Wang Wei; Yang Fang; Tian Dayu; Liu Peng; Li Ting; Luo Kui

Archive | 2013

Method for determining etching time of sacrificial layer in real time

Zhao Danqi; Zhang Dacheng; He Jun; Huang Xian; Yang Fang; Tian Dayu; Liu Peng; Wang Wei; Li Ting; Luo Kui

Archive | 2013

Method for preparing self-packaging of MEMS (micro electro mechanical systems) device based on surface sacrificial layer technology

Zhao Danqi; Zhang Dacheng; He Jun; Huang Xian; Yang Fang; Tian Dayu; Liu Peng; Wang Wei; Li Ting; Luo Kui

Archive | 2013

Self-packaged MEMS (micro-electro-mechanical systems) device and infrared sensor

Zhao Danqi; Zhang Dacheng; He Jun; Huang Xian; Yang Fang; Tian Dayu; Liu Peng; Wang Wei; Li Ting; Luo Kui

Micro & Nano Letters | 2012

Uncooled bimaterial cantilever for infrared detection based on resonant frequency tracking

Zhao Danqi; Zhang Xia; Liu Peng; Yang Fang; Zhang Dacheng

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Collaboration

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Liu Peng

Peking University

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Yang Fang

Peking University

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Zhang Dacheng

Peking University

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Li Ting

Peking University

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Luo Kui

Peking University

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Tian Dayu

Peking University

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Wang Wei

Peking University

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Zhang Xia

Communication University of China

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