Katsuhiko Komori
Tokyo Electron
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Publication
Featured researches published by Katsuhiko Komori.
international symposium on semiconductor manufacturing | 2016
Yuichi Takenaga; Takahito Kasai; Katsuhiko Komori; Hiroyuki Hayashi; Satoru Ogawa
This paper describes the development and experimental results of a process control system. The system enabled adjusting film thickness and in-film dopant concentration at the same time on a batch LPCVD machine. By this, anyone could adjust process results easily and exactly in a short time.
Archive | 2011
Akinobu Kakimoto; Katsuhiko Komori; Kazuhide Hasebe
Archive | 2012
Akinobu Kakimoto; Satoshi Takagi; Toshiyuki Ikeuchi; Katsuhiko Komori; Kazuhide Hasebe
Archive | 2014
Kazuhide Hasebe; Kazuya Takahashi; Katsuhiko Komori; Yoshikazu Furusawa; Mitsuhiro Okada; Hiroyuki Hayashi; Akinobu Kakimoto
Archive | 2014
Daisuke Suzuki; Kazuya Takahashi; Mitsuhiro Okada; Katsuhiko Komori; Satoshi Onodera
Archive | 2008
Masaki Kurokawa; Katsuhiko Komori; Norifumi Kimura; Kazuhide Hasebe; Takehiko Fujita; Akitake Tamura; Yoshikazu Furusawa
229th ECS Meeting (May 29 - June 2, 2016) | 2016
Ryo Yokogawa; Kazuya Takahashi; Katsuhiko Komori; Yoshihiro Hirota; Naomi Sawamoto; Atsushi Ogura
Archive | 2014
Yuichi Takenaga; Katsuhiko Komori
Archive | 2012
Katsuhiko Komori; 克彦 小森; Akinaga Kakimoto; 明修 柿本; Mitsuhiro Okada; 充弘 岡田; Nobuhiro Takahashi; 信広 高橋
The Japan Society of Applied Physics | 2016
Ryo Yokogawa; Kazuya Takahashi; Katsuhiko Komori; Yoshihiro Hirota; Naomi Sawamoto; Atsushi Ogura
