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Akitaka Shimizu

Tokyo Electron

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Publication

Featured researches published by Akitaka Shimizu.

Archive | 2012

Substrate cleaning apparatus and vacuum processing system

Kazuya Dobashi; Kensuke Inai; Akitaka Shimizu; Kenta Yasuda; Yu Yoshino; Toshihiro Aida; Takehiko Senoo

Archive | 2004

Etching method and computer storage medium storing program for controlling same

Masato Kushibiki; Masayuki Sawataishi; Akitaka Shimizu

Archive | 2006

Plasma processing method and post-processing method

Akitaka Shimizu; Kosuke Ogasawara; Susumu Saito

Archive | 2006

Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program

Tsuyoshi Moriya; Takaaki Hirooka; Akitaka Shimizu; Satoshi Tanaka

Archive | 2007

SUBSTRATE PROCESSING APPARATUS AND SIDE WALL COMPONENT

Shosuke Endoh; Tsuyoshi Moriya; Akitaka Shimizu

Archive | 2014

METHOD OF ETCHING COPPER LAYER AND MASK

Eiichi Nishimura; Masato Kushibiki; Takashi Sone; Akitaka Shimizu; Fumiko Yamashita

Archive | 2008

TREATMENT METHOD OF SUBSTRATE, AND SUBSTRATE TREATMENT DEVICE

宏幸 ▲高▼橋; Chie Kato; Eiichi Nishimura; Akitaka Shimizu; Hiroyuki Takahashi; 千恵 加藤; 昭貴 清水; 栄一 西村

Archive | 2010

SUBSTRATE PROCESSING CONTROL METHOD AND STORAGE MEDIUM

Susumu Saito; Akitaka Shimizu

Archive | 2009

COMPONENT CLEANING METHOD AND STORAGE MEDIUM

Tsuyoshi Moriya; Akitaka Shimizu

Archive | 2015

METHOD OF CLEANING PLASMA PROCESSING APPARATUS

Hiroki Kishi; Mitsuru Hashimoto; Keiichi Shimoda; Eiichi Nishimura; Akitaka Shimizu

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Eiichi Nishimura

Tokyo Electron

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Masato Kushibiki

Tokyo Electron

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Tsuyoshi Moriya

Hiroshima University

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Susumu Saito

Tokyo Electron

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Satoshi Tanaka

Toshiba

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Takaaki Hirooka

Tokyo Electron

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Fumiko Yamashita

Tokyo Electron

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Genji Nakamura

Tokyo Electron

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Hiroki Kishi

Tokyo Electron

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Kazuya Dobashi

Tokyo Electron

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