Aleksandar Radisic
Ghent University
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Publication
Featured researches published by Aleksandar Radisic.
Semiconductors, Metal Oxides, and Composites: Metallization and Electrodeposition of Thin Films and Nanostructures | 2010
Aleksandar Radisic; Magi Margalit Nagar; Katrien Strubbe; Silvia Armini; Zaid El-Mekki; Henny Volders; Wouter Ruythooren; Philippe M. Vereecken
We have studied electrochemical deposition of copper on ruthenium-tantalum (Ru-Ta) alloy, tantalum (Ta), and cobalt (Co) substrates using cyclic voltammetry and galvanostatic methods. We show that a single-step direct-plating from acidic Cu bath approach is favorable on thin Ru-Ta films, while it presents a significant challenge for plating on resistive Ta and Co substrates.
Meeting Abstracts | 2011
Aleksandar Radisic; Harold Philipsen; Mia Honore; Yu-Shuen Wang; Nancy Heylen; Zaid El-Mekki; Silvia Armini; Kevin Vandersmissen; Simon Rodet; Annemie Van Ammel; Hugo Bender; Christel Drijbooms; Kris Vanstreels; Wouter Ruythooren
In the work presented here, we focused on fabrication of Cu nails for 3D Stacked-Integrated-Circuits (3D-SIC) applications using electrochemical deposition from the bath with model (‘open source’) additives. We have studied the effects of bath composition on the Cu fill profile and overburden, and have also examined the correlations between phenomena observed during post-plating-processing and bath composition. Based on these results, we explored different approaches to improving Cu removal rate during Chemical Mechanical Polishing (CMP).
Processing, Materials, and Integration of Damascene and 3D Interconnects | 2010
Aleksandar Radisic; Ole Lühn; Jan Vaes; Silvia Armini; Zaid El-Mekki; Dunja Radisic; Wouter Ruythooren; Philippe M. Vereecken
Meeting Abstracts | 2012
Aleksandar Radisic; Liu Yang; Christel Drijbooms; Hugo Bender
Electrodeposition of Nanoengineered Materials and Alloys 2 | 2008
Aleksandar Radisic; Pieter Boelen; Aron Rosenfeld; Jose Luis Hernandez; Gerald Beyer; Philippe M. Vereecken
225th ECS Meeting (May 11-15, 2014) | 2014
Yafa Zargouni; Stella Deheryan; Aleksandar Radisic; Daire J. Cott; Sinha Rochan; Khaled Alouani; Cedric Huyghebaert; Philippe M. Vereecken
Archive | 2010
Philippe M. Vereecken; Tanya A. Atanasova; Margalit Nagar; Aleksandar Radisic
Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 6 | 2016
Liu Yang; John Slabbekoorn; Mia Honore; Karen Stiers; Herbert Struyf; Philippe M. Vereecken; Aleksandar Radisic
227th ECS Meeting (May 24-28, 2015) | 2015
Liu Yang; Aleksandar Radisic; Johan Deconinck; Philippe M. Vereecken
Electrodeposition for Micro- and Nano- Battery Materials | 2014
Aleksandar Radisic; Daire J. Cott; Stella Deheryan; Ahmed S. Etman; Yafa Zargouni; Philippe M. Vereecken
