Gopalakrishna B. Prabhu

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Featured researches published by Gopalakrishna B. Prabhu.

Archive | 2001

CMP platen with patterned surface

Robert D. Tolles; Steven T. Mear; Gopalakrishna B. Prabhu; Sidney P. Huey; Fred C. Redeker

Archive | 2006

Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles

Arulkumar Shanmugasundram; Alexander T. Schwarm; Gopalakrishna B. Prabhu

Archive | 2001

CMP polishing pad

Robert D. Tolles; Steven T. Mear; Gopalakrishna B. Prabhu; Steven M. Zuniga; Hung Chen

Archive | 1998

Carrier head with edge control for chemical mechanical polishing

Steven M. Zuniga; Hung Chen; Gopalakrishna B. Prabhu

Archive | 2009

Method for forming an electrical connection

Zhiyong Li; Chuck Luu; Gopalakrishna B. Prabhu; Danny Cam Toan Lu; Garry Kwong; David Tanner

Archive | 1998

Method of post CMP defect stability improvement

Boris Fishkin; Charles C. Garretson; Peter McKeever; Thomas H. Osterheld; Gopalakrishna B. Prabhu; Doyle E. Bennett; Benjamin A. Bonner; Sidney P. Huey

Archive | 2000

Method of chemical mechanical polishing with edge control

Steven M. Zuniga; Hung Chen; Gopalakrishna B. Prabhu

Archive | 2003

Polishing processes for shallow trench isolation substrates

Gopalakrishna B. Prabhu; Thomas H. Osterheld; Garlen C. Leung; Adam H. Zhong; Peter McReynolds; Yi-Yung Tao; Gregory E. Menk; Vasanth N. Mohan; Christopher Heung-Gyun Lee

Archive | 2001

Methods and compositions for chemical mechanical polishing

Wei-Yung Hsu; Gopalakrishna B. Prabhu; Lizhong Sun; Daniel A. Carl

Archive | 2009

Solar panel edge deletion module

Dhruv Gajaria; Zhiyong Li; Gopalakrishna B. Prabhu; Yacov Elgar; John Visitacion; Yong Liu; Jeffrey S. Sullivan; Salvador P. Umotoy; Tai T. Ngo; Michael Marriott; Peter Crundwell; Vinay Shah; Ho Gene Choi; Dennis C. Pierce

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