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Hung Chih Chen

Applied Materials

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Publication

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Archive | 2010

Multiple zone carrier head with flexible membrane

Hung Chih Chen; Jeonghoon Oh; Tsz-Sin Siu; Thomas Brezoczky; Steven M. Zuniga

Archive | 2009

APPARATUS AND METHODS FOR CONDITIONING A POLISHING PAD

Roy C. Nangoy; Shou-sung Chang; Donald J. K. Olgado; Hung Chih Chen; Gerald John Alonzo

Archive | 2004

Carrier head with flexible membrane to provide controllable pressure and loading area

Steven M. Zuniga; Hung Chih Chen; Ming Kuie Tseng

Archive | 2005

CARRIER HEAD WITH MULTIPLE CHAMBERS

Steven M. Zuniga; Hung Chih Chen; Thomas Brezoczky; Steven T. Mear

Archive | 2007

Fast substrate loading on polishing head without membrane inflation step

Jeonghoon Oh; Andrew J. Nagengast; Steven M. Zuniga; Hung Chih Chen

Archive | 2003

Two part retaining ring

Hung Chih Chen; Jeonghoon Oh; Steven M. Zuniga; Robert D. Tolles

Archive | 2008

IN-SITU PERFORMANCE PREDICTION OF PAD CONDITIONING DISK BY CLOSED LOOP TORQUE MONITORING

Sameer Deshpande; Shou-sung Chang; Hung Chih Chen; Roy C. Nangoy; Stan D. Tsai

Archive | 2008

Closed loop control of pad profile based on metrology feedback

Shou-sung Chang; Hung Chih Chen; Stan D. Tsai; Yuchun Wang

Archive | 2005

Flexible membrane for multi-chamber carrier head

Hung Chih Chen; Jeonghoon Oh; Steven M. Zuniga

Archive | 2005

Profile control platen

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Thomas H. Osterheld; Sen-Hou Ko; Mohsen Salek

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Collaboration

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Steven M. Zuniga

Applied Materials

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Jeonghoon Oh

Applied Materials

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Shou-sung Chang

Applied Materials

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Samuel Chu-Chiang Hsu

Applied Materials

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Gautam Shashank Dandavate

Applied Materials

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Charles C. Garretson

Applied Materials

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Stan D. Tsai

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Douglas R. Mcallister

Applied Materials

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Jason Garcheung Fung

Applied Materials

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