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Allen L. Evans

Advanced Micro Devices

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Publication

Featured researches published by Allen L. Evans.

Archive | 2000

Method and apparatus for determining measurement frequency based on hardware age and usage

Bradley M. Davis; Allen L. Evans; Craig W. Christian

Archive | 2000

Control mechanism for matching process parameters in a multi-chamber process tool

Craig W. Christian; Bradley M. Davis; Allen L. Evans

Archive | 2003

Method of reducing interlayer dielectric thickness variation feeding into a planarization process

Allen L. Evans

Archive | 1996

Polysilicon diffusion doping method employing a deposited doped oxide layer with a highly uniform thickness

W. Mark Carter; Allen L. Evans; John G. Zvonar

Archive | 2000

Tungsten interconnect method

Timothy Z. Hossain; Amiya R. Ghatak-Roy; Allen L. Evans

Archive | 1999

Feedback control of deposition thickness based on polish planarization

Jeremy Lansford; Allen L. Evans

Archive | 2000

Wafer manufacturing control

Craig W. Christian; Bradley M. Davis; Allen L. Evans

Archive | 1999

Interlayer between titanium nitride and high density plasma oxide

Christopher L. Wooten; Craig W. Christian; Thomas E. Spikes; Allen L. Evans; Tim Z. Hossain

Archive | 2001

Method for preventing or reducing delamination of deposited insulating layers

Allen L. Evans; David E. Brown; Michael J. Satterfield; Arturo N. Morosoff

Archive | 2000

Method and apparatus for reducing deposition variation by modeling post-clean chamber performance

Bradley M. Davis; Allen L. Evans; Craig W. Christian

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Craig W. Christian

Advanced Micro Devices

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Bradley M. Davis

Advanced Micro Devices

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Christopher L. Wooten

Advanced Micro Devices

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Thomas E. Spikes

Advanced Micro Devices

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Tim Z. Hossain

Advanced Micro Devices

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Amiya R. Ghatak-Roy

Advanced Micro Devices

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Arturo N. Morosoff

Advanced Micro Devices

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David E. Brown

Advanced Micro Devices

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H. Jim Fulford

Advanced Micro Devices

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Jeremy Lansford

Advanced Micro Devices

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