Allen L. Evans

Method and apparatus for determining measurement frequency based on hardware age and usage

Control mechanism for matching process parameters in a multi-chamber process tool

Method of reducing interlayer dielectric thickness variation feeding into a planarization process

Polysilicon diffusion doping method employing a deposited doped oxide layer with a highly uniform thickness

Tungsten interconnect method

Feedback control of deposition thickness based on polish planarization

Wafer manufacturing control

Interlayer between titanium nitride and high density plasma oxide

Method for preventing or reducing delamination of deposited insulating layers

Method and apparatus for reducing deposition variation by modeling post-clean chamber performance