Craig W. Christian

Method of fabricating semiconductor gate electrode with fluorine migration barrier

System and method for calculating cluster tool performance metrics using a weighted configuration matrix

Method for filling trenches

Method for low energy implantation of argon to control titanium silicide formation

Method for forming a silicide using ion beam mixing

Method and apparatus for determining measurement frequency based on hardware age and usage

Integrated circuit fabrication using a metal silicide having a sputterdeposited metal nitride layer

Advanced process control (apc) of copper thickness for chemical mechanical planarization(cmp) optimization

Germanium implant for use with ultra-shallow junctions

Method of making a semiconductor having selectively enhanced field oxide areas