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Dive into the research topics where Amit Khandelwal is active.

Publication


Featured researches published by Amit Khandelwal.


Archive | 2006

Contact metallization scheme using a barrier layer over a silicide layer

Timothy W. Weidman; Kapila Wijekoon; Zhize Zhu; Avgerinos V. Gelatos; Amit Khandelwal; Arulkumar Shanmugasundram; Michael X. Yang; Fang Mei; Farhad Moghadam


Archive | 2004

Ruthenium as an underlayer for tungsten film deposition

Srinivas Gandikota; Madhu Moorthy; Amit Khandelwal; Avgerinos V. Gelatos; Mei Chang; Kavita Shah; Seshadri Ganguli


Archive | 2008

Methods for depositing tungsten layers employing atomic layer deposition techniques

Ken Kaung Lai; Ravi Rajagopalan; Amit Khandelwal; Madhu Moorthy; Srinivas Gandikota; Joseph Castro; Avgerinos V. Gelatos; Cheryl Knepfler; Ping Jian; Hongbin Fang; Chao-Ming Huang; Ming Xi; Michael X. Yang; Hua Chung; Jeong Soo Byun


Archive | 2013

Tungsten deposition sequence

Benjamin C. Wang; Amit Khandelwal; Avegerinos V. Gelatos; Joshua Collins; Kedar Sapre; Nitin K. Ingle


Archive | 2010

Process for forming cobalt and cobalt silicide materials in tungsten contact applications

Seshadri Ganguli; Sang-Ho Yu; See-Eng Phan; Mei Chang; Amit Khandelwal; Hyoung-Chan Ha


Archive | 2008

Atomic layer deposition of tungsten materials

Amit Khandelwal; Madhu Moorthy; Avgerinos V. Gelatos; Kai Wu


Archive | 2008

Vapor deposition of tungsten materials

Sang-Hyeob Lee; Avgerinos V. Gelatos; Kai Wu; Amit Khandelwal; Ross Marshall; Emily Renuart; Wing-Cheong Lai; Jing Lin


Archive | 2009

Method of depositing tungsten film with reduced resistivity and improved surface morphology

Kai Wu; Amit Khandelwal; Averginos V. Gelatos


Archive | 2008

Atomic layer deposition process for tungsten material

Avgerinos V. Gelatos; Amit Khandelwal; Madhu Moorthy; Kai Wu; ヴイ. ジェラトス アヴェジェリノス; カーンデルウェル アミット; ウー カイ; ムーアシー マデュ


Archive | 2008

Ruthenium or cobalt as an underlayer for tungsten film deposition

Srinivas Gandikota; Madhu Moorthy; Amit Khandelwal; Avgerinos V. Gelatos; Mei Chang; Kavita Shah; Seshadri Ganguli

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