Anant Chimmalgi | Researchain

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Featured researches published by Anant Chimmalgi.

Archive | 2012

PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE

Anant Chimmalgi; Anatoly Shchemelinin; Ilya Bezel; Rajeev Patil

Archive | 2013

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source

Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew A. Panzer; Matthew Derstine; Jincheng Wang; Anant Chimmalgi; Rajeev Patil; Rudolf Brunner

Archive | 2014

Method and System for Controlling Convective Flow in a Light-Sustained Plasma

Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine; Kenneth P. Gross; David W. Shortt; Wei Zhao; Anant Chimmalgi; Jincheng Wang

Archive | 2013

Diode laser based broad band light sources for wafer inspection tools

Anant Chimmalgi; Younus Vora; Rudolf Brunner

Archive | 2015

High Power Broadband Light Source

Anant Chimmalgi; Rahul Yadav; Anatoly Shchemelinin; Ilya Bezel; Matthew Derstine

Archive | 2015

Light Source with Nanostructured Antireflection Layer

Sebaek Oh; Anant Chimmalgi; Rahul Yadav; Matthew Derstine; Ilya Bezel

Archive | 2013

Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures

Jincheng Wang; Anant Chimmalgi; Rajeev Patil; Erik Kim; Rudolf Brunner; Quang Giang; Lauren Wilson; Ken Gross; Ilya Bezel; Dan Scott; Younus Vora; Matthew Derstine; Cedric Lasfargues

Archive | 2016

System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source

Ilya Bezel; Anatoly Shchemelinin; Kenneth P. Gross; Richard Solarz; Lauren Wilson; Rahul Yadav; Joshua Wittenberg; Anant Chimmalgi; Xiumei Liu; Brooke Bruguier

Archive | 2015