Anatoly Shchemelinin
KLA-Tencor
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Publication
Featured researches published by Anatoly Shchemelinin.
Metrology, Inspection, and Process Control for Microlithography XI | 1997
Anatoly Shchemelinin; Eugene Shifrin; Alexander I. Zaslavsky
The basic challenges of optical overlay measurements are discussed. It is shown that overlay measurement precision is determined by optical resolution, signal to noise ratio of the measurement system and properties of the overlay target. Some tips for better overlay target design ad hardware improvement are formulated. It is shown that an interferometer based measurement system allows better accuracy than the brightfield one. It is shown that for current measurement techniques, 130 nm design rule requirements can be met.
Archive | 2012
Anant Chimmalgi; Anatoly Shchemelinin; Ilya Bezel; Rajeev Patil
Archive | 2013
Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew A. Panzer; Matthew Derstine; Jincheng Wang; Anant Chimmalgi; Rajeev Patil; Rudolf Brunner
Archive | 2013
Anatoly Shchemelinin; Ilya Bezel
Archive | 2012
Ilya Bezel; Anatoly Shchemelinin; Yanming Zhao; Matthew Derstine
Archive | 2014
Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine
Archive | 2010
Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew Derstine; Richard Solarz
Archive | 2014
Gregory Brady; Andrei V. Shchegrov; Lawrence D. Rotter; Derrick Shaughnessy; Anatoly Shchemelinin; Ilya Bezel; M. A. Arain; Anatoly A. Vasiliev; James Andrew Allen; Oleg Shulepov; Andrew V. Hill; Ohad Bachar; Moshe Markowitz; Yaron Ish-shalom; Ilan Sela; Amnon Manassen; Alexander Svizher; Maxim Khokhlov; Avi Abramov; Oleg Tsibulevsky; Daniel Kandel; Mark Ghinovker
Archive | 2014
Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine; Kenneth P. Gross; David W. Shortt; Wei Zhao; Anant Chimmalgi; Jincheng Wang
Archive | 2012
Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine
