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Dive into the research topics where Ilya Bezel is active.

Publication


Featured researches published by Ilya Bezel.


Archive | 2012

PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE

Anant Chimmalgi; Anatoly Shchemelinin; Ilya Bezel; Rajeev Patil


Archive | 2013

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source

Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew A. Panzer; Matthew Derstine; Jincheng Wang; Anant Chimmalgi; Rajeev Patil; Rudolf Brunner


Archive | 2013

Laser Sustained Plasma Light Source With Electrically Induced Gas Flow

Anatoly Shchemelinin; Ilya Bezel


Archive | 2012

ADAPTIVE OPTICS FOR COMPENSATING ABERRATIONS IN LIGHT-SUSTAINED PLASMA CELLS

Ilya Bezel; Anatoly Shchemelinin; Yanming Zhao; Matthew Derstine


Archive | 2014

Method and System for Controlling Convection within a Plasma Cell

Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine


Archive | 2010

Optical pumping to sustain hot plasma

Ilya Bezel; Anotoly Shchemelinin; Eugene Shifrin; Matthew Derstine


Archive | 2010

Multi-Wavelength Pumping to Sustain Hot Plasma

Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew Derstine; Richard Solarz


Archive | 2014

Systems for Providing Illumination in Optical Metrology

Gregory Brady; Andrei V. Shchegrov; Lawrence D. Rotter; Derrick Shaughnessy; Anatoly Shchemelinin; Ilya Bezel; M. A. Arain; Anatoly A. Vasiliev; James Andrew Allen; Oleg Shulepov; Andrew V. Hill; Ohad Bachar; Moshe Markowitz; Yaron Ish-shalom; Ilan Sela; Amnon Manassen; Alexander Svizher; Maxim Khokhlov; Avi Abramov; Oleg Tsibulevsky; Daniel Kandel; Mark Ghinovker


Archive | 2014

Method and System for Controlling Convective Flow in a Light-Sustained Plasma

Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine; Kenneth P. Gross; David W. Shortt; Wei Zhao; Anant Chimmalgi; Jincheng Wang


Archive | 2012

Optically pumping to sustain plasma

Ilya Bezel; Anatoly Shchemelinin; Matthew Derstine

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