Anantha K. Subramani | Researchain

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Featured researches published by Anantha K. Subramani.

Archive | 2004

Selectable dual position magnetron

Tza-Jing Gung; Hong S. Yang; Anantha K. Subramani; Maurice E. Ewert; Keith A. Miller; Vincent E. Burkhart

Archive | 1997

Recessed coil for generating a plasma

Anantha K. Subramani; John C. Forster; Bradley O. Stimson; Sergio Edelstein; Howard Grunes; Avi Tepman; Zheng Xu

Archive | 2001

Magnetron with a rotating center magnet for a vault shaped sputtering target

Anantha K. Subramani; Umesh Kelkar; Jianming Fu; Praburam Gopalraja

Archive | 1997

Embossed semiconductor fabrication parts

Donald M. Mintz; Anantha K. Subramani; Lolita L. Sharp; David Datong Huo

Archive | 2003

Partially filling copper seed layer

Wei D. Wang; Anantha K. Subramani; Jianming Fu; Praburam Gopalraja; Jick M. Yu; Fusen Chen

Archive | 2009

Wafer processing deposition shielding components

Martin Lee Riker; Maurice E. Ewert; Anantha K. Subramani

Archive | 1999

Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system

Gilbert Hausmann; Anantha K. Subramani; Peter Satitpunwaycha; Raymond Gristi; Bradley O. Stimson; Chia-Au Bill Lu; Lawrance A. Ringor; Michael Sugarman

Archive | 2007

Resputtered copper seed layer

Xianmin Tang; Arvind Sundarrajan; Daniel C. Lubben; Qian Luo; Tza-Jing Gung; Anantha K. Subramani; Hua Chung; Xinyu Fu; Rongjun Wang; Yong Cao; Jick M. Yu; John C. Forster; Praburam Gopalraja

Archive | 2011