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Keith A. Miller

Applied Materials

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Publication

Featured researches published by Keith A. Miller.

Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott

Archive | 2004

Selectable dual position magnetron

Tza-Jing Gung; Hong S. Yang; Anantha K. Subramani; Maurice E. Ewert; Keith A. Miller; Vincent E. Burkhart

Archive | 2002

Reducing particle generation during sputter deposition

Hien-Minh Huu Le; Keith A. Miller; Hoa T. Kieu; Kenny King-Tai Ngan

Archive | 1999

Method and apparatus to improve the side wall and bottom coverage in IMP process by using magnetic field

Wei Wang; Keith A. Miller; James Van Gogh; Praburam Gopalraja

Archive | 2004

Support ring assembly

Keith A. Miller; Ilya Lavitsky

Archive | 2006

Notched deposition ring

Keith A. Miller

Archive | 2004

Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky

Archive | 2007

SPUTTERING OF THERMALLY RESISTIVE MATERIALS INCLUDING METAL CHALCOGENIDES

Mengqi Ye; Keith A. Miller; Peijun Ding; Goichi Yoshidome; Rong Tao

Archive | 2005

Shields usable with an inductively coupled plasma reactor

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky

Archive | 2005

Magnetron having continuously variable radial position

Keith A. Miller; Anantha K. Subramani; Maurice E. Ewert; Tza-Jing Gung; Hong S. Yang; Vincent E. Burkhart

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Muhammad Rasheed

Applied Materials

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Tza-Jing Gung

Applied Materials

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Alan Ritchie

Applied Materials

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Martin Lee Riker

Applied Materials

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Anantha K. Subramani

Applied Materials

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Ilya Lavitsky

Applied Materials

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John C. Forster

Applied Materials

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Xianmin Tang

Applied Materials

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Donny Young

Applied Materials

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Maurice E. Ewert

Applied Materials

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