Li-Qun Xia | Researchain

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Featured researches published by Li-Qun Xia.

Archive | 1996

Methods and apparatus for cleaning surfaces in a substrate processing system

Gary Fong; Li-Qun Xia; Srinivas D. Nemani; Ellie Yieh

Archive | 1999

Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound

Farhad Moghadam; David Cheung; Ellie Yieh; Li-Qun Xia; Wai-Fan Yau; Chi-I Lang; Shin-Puu Jeng; Frederic Gaillard; Shankar Venkataraman; Srinivas D. Nemani

Archive | 1999

Multistep chamber cleaning and film deposition process using a remote plasma that also enhances film gap fill

Li-Qun Xia; Ellie Yieh

Archive | 1996

Method and apparatus for gettering fluorine from chamber material surfaces

Li-Qun Xia; Visweswaren Sivaramakrishnan; Srinivas D. Nemani; Ellie Yieh; Gary Fong

Archive | 2000

Method for cleaning a process chamber

Huong Thanh Nguyen; Michael Barnes; Li-Qun Xia; Ellie Yieh

Archive | 2000

Method of depositing low k films using an oxidizing plasma

Tzu-Fang Huang; Yung-Cheng Lu; Li-Qun Xia; Ellie Yieh; Wai-Fan Yau; David Cheung; Ralf B. Willecke; Kuo-Wei Liu; Ju-hyung Lee; Farhad Moghadam; Yeming Jim Ma

Archive | 2000