Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Bikram Kapoor is active.

Publication


Featured researches published by Bikram Kapoor.


Archive | 2004

Hydrogen assisted hdp-cvd deposition process for aggressive gap-fill technology

Bikram Kapoor; M. Ziaul Karim; Anchuan Wang


Archive | 2002

High density plasma CVD process for gapfill into high aspect ratio features

Farhan Ahmad; Michael Awdshiew; Alok Jain; Bikram Kapoor


Archive | 2003

HDP-CVD multistep gapfill process

M. Ziaul Karim; Bikram Kapoor; Anchuan Wang; Dongqing Li; Katsunari Ozeki; Manoj Vellaikal; Zhuang Li


Archive | 2003

Reactive ion etching for semiconductor device feature topography modification

Hemant P. Mungekar; Anjana M. Patel; Manoj Vellaikal; Anchuan Wang; Bikram Kapoor


Archive | 2000

Controlled method of silicon-rich oxide deposition using HDP-CVD

Bikram Kapoor; Kent Rossman


Archive | 2004

Oxygen plasma treatment for enhanced HDP-CVD gapfill

Hemant P. Mungekar; Young S. Lee; Manoj Vellaikal; Karen Greig; Bikram Kapoor


Archive | 2003

HDP-CVD uniformity control

Padmanabhan Krishnaraj; Bruno Geoffrion; Michael S. Cox; Lin Zhang; Bikram Kapoor; Anchuan Wang; Zhenjiang Cui


Archive | 2007

Microcontamination abatement method in semiconductor processing

Hemant P. Mungekar; Bikram Kapoor; Zhuang Li


Archive | 2001

Silicon-rich oxide deposition using HDP-CVD

Bikram Kapoor; Kent Rossman


Archive | 2004

Procede de remplissage multi-etape hdp-cvd

Bikram Kapoor; Ziaul J Karim; Dongquin Li; Zhuang Li; Katsunary Ozeki; Manoj Vellaikal; Anchuan Wang

Collaboration


Dive into the Bikram Kapoor's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge