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Bikram Kapoor

Applied Materials

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Publication

Featured researches published by Bikram Kapoor.

Archive | 2004

Hydrogen assisted hdp-cvd deposition process for aggressive gap-fill technology

Bikram Kapoor; M. Ziaul Karim; Anchuan Wang

Archive | 2002

High density plasma CVD process for gapfill into high aspect ratio features

Farhan Ahmad; Michael Awdshiew; Alok Jain; Bikram Kapoor

Archive | 2003

HDP-CVD multistep gapfill process

M. Ziaul Karim; Bikram Kapoor; Anchuan Wang; Dongqing Li; Katsunari Ozeki; Manoj Vellaikal; Zhuang Li

Archive | 2003

Reactive ion etching for semiconductor device feature topography modification

Hemant P. Mungekar; Anjana M. Patel; Manoj Vellaikal; Anchuan Wang; Bikram Kapoor

Archive | 2000

Controlled method of silicon-rich oxide deposition using HDP-CVD

Bikram Kapoor; Kent Rossman

Archive | 2004

Oxygen plasma treatment for enhanced HDP-CVD gapfill

Hemant P. Mungekar; Young S. Lee; Manoj Vellaikal; Karen Greig; Bikram Kapoor

Archive | 2003

HDP-CVD uniformity control

Padmanabhan Krishnaraj; Bruno Geoffrion; Michael S. Cox; Lin Zhang; Bikram Kapoor; Anchuan Wang; Zhenjiang Cui

Archive | 2007

Microcontamination abatement method in semiconductor processing

Hemant P. Mungekar; Bikram Kapoor; Zhuang Li

Archive | 2001

Silicon-rich oxide deposition using HDP-CVD

Bikram Kapoor; Kent Rossman

Archive | 2004

Procede de remplissage multi-etape hdp-cvd

Bikram Kapoor; Ziaul J Karim; Dongquin Li; Zhuang Li; Katsunary Ozeki; Manoj Vellaikal; Anchuan Wang

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Collaboration

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Anchuan Wang

Applied Materials

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Hemant P. Mungekar

Applied Materials

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Manoj Vellaikal

Applied Materials

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Zhuang Li

Applied Materials

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Kent Rossman

Applied Materials

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M. Ziaul Karim

Applied Materials

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Alok Jain

Applied Materials

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Anjana M. Patel

Applied Materials

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Bruno Geoffrion

Applied Materials

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Dongqing Li

Applied Materials

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