Andreas Dr Franz

Absolute interferometer measuring process and apparatus having a measuring interferometer, control interferometer and tunable laser

Waveguide type displacement interferometer having two reference paths

Dual-beam interferometer with a phase grating

Photoelectric position measuring system using gratings having specified dimensions to suppress harmonics

Phase grating and method of producing phase grating

Prodn. of marking carrier with marking pref. in scale structure of measuring unit

Apparatus and method for measuring absolute measurements having two measuring interferometers and a tunable laser

Fiducial mark and optical system having a fiducial mark capable to be illuminated

Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal

Position measuring method and apparatus for generating periodic signals free of harmonics