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Michael Allgäuer

Heidenhain

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Publication

Featured researches published by Michael Allgäuer.

Archive | 1997

Photoelectric position measuring device

Peter Speckbacher; Michael Allgäuer; Georg Flatscher; Anton Sailer; Walburga Kern

Archive | 1993

Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength

Walter Huber; Michael Allgäuer

Archive | 1996

Phase grating and method of producing phase grating

Peter Speckbacher; Georg Flatscher; Michael Allgäuer; Erich Bayer; Erwin Spanner; Andreas Dr Franz

Archive | 1998

Fiducial mark and optical system having a fiducial mark capable to be illuminated

Michael Allgäuer; Andreas Dr Franz; Dieter Michel; Heinz Tovar

Archive | 1990

Integrated optical precision measuring device

Michael Allgäuer

Archive | 1992

Device for coupling and/or decoupling beams of light, with an integrated optical component

Andreas Dr Franz; Michael Allgäuer

Archive | 1990

INTEGRATED OPTICAL POSITION MEASURING DEVICE AND METHOD WITH REFERENCE AND MEASUREMENT SIGNALS

Michael Allgäuer

Archive | 1995

Phase grating and method of fabricating a phase grating

Peter Speckbacher; Georg Flatscher; Michael Allgäuer; Erich Bayer; Erwin Spanner; Andreas Dr Franz

Archive | 1995

Scale, method of fabricating a scale and a position measuring device

Michael Allgäuer; Erich Bayer; Georg Flatscher; Andreas Dr Franz; Erwin Spanner; Peter Speckbacher

Archive | 1990

Device for coupling and/or uncoupling of light beams with an integrated optical element

Andreas Dr Franz; Michael Allgäuer

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Collaboration

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Andreas Dr Franz

Heidenhain

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Georg Flatscher

Heidenhain

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Peter Speckbacher

Heidenhain

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Erich Bayer

Bayer

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Erwin Spanner

Heidenhain

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Stefan Dipl.-Phys. Marchfelder

Heidenhain

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Christian Callimici

Heidenhain

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Dieter Michel

Heidenhain

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Walter Huber

Heidenhain

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Anton Sailer

Heidenhain

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