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Andreas G. Hegedus

Applied Materials

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Publication

Featured researches published by Andreas G. Hegedus.

Archive | 2005

Substrate processing apparatus using a batch processing chamber

Randhir Thakur; Steve Ghanayem; Joseph Yudovsky; Aaron Webb; Adam Brailove; Nir Merry; Vinay Shah; Andreas G. Hegedus

Archive | 2005

Processing multilayer semiconductors with multiple heat sources

Sundar Ramamurthy; Andreas G. Hegedus; Randhir Thakur

Archive | 1998

Puncture resistant electrostatic chuck

Arik Donde; Hyman J. Levinstein; Robert W. Wu; Andreas G. Hegedus; Edwin C. Weldon; Shamouil Shamouilian; Jon Clinton; Surinder S. Bedi

Archive | 2001

Semiconductor processing system with lamp cooling

Joseph M. Ranish; Andreas G. Hegedus

Archive | 1999

Micro grooved support surface for reducing substrate wear and slip formation

Brian Lue; Andreas G. Hegedus; Dean Jennings; Candy Ching-Fai Siu

Archive | 2005

Contact opening metrology

Alexander Kadyshevitch; Christopher G. Talbot; Dmitry Shur; Andreas G. Hegedus

Archive | 2000

Temperature probes for measuring substrate temperature

Andreas G. Hegedus

Archive | 2007

Temperature uniformity measurements during rapid thermal processing

Wolfgang Aderhold; Andreas G. Hegedus; Nir Merry

Archive | 2006

Scanned rapid thermal processing with feed forward control

Andreas G. Hegedus

Archive | 2004

Elimination of flow and pressure gradients in low utilization processes

James P. Cruse; Andreas G. Hegedus; Satheesh Kuppurao

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Alexander Kadyshevitch

Applied Materials

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Arik Donde

Applied Materials

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Christopher G. Talbot

Applied Materials

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Dmitry Shur

Applied Materials

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Edwin C. Weldon

Applied Materials

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Hyman J. Levinstein

Applied Materials

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James P. Cruse

Applied Materials

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Jon Clinton

Applied Materials

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Joseph M. Ranish

Applied Materials

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Nir Merry

Applied Materials

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