Is this you? Create Your Porfile
Avatar

Hyman J. Levinstein

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Hyman J. Levinstein is active.

Explore More

Publication

Featured researches published by Hyman J. Levinstein.

Archive | 1997

Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same

Dennis S. Grimard; Vijay D. Parkhe; Hyman J. Levinstein; Fusen Chen; Michael G. Chafin

Archive | 1995

ELECTROSTATIC CHUCK WITH CONFORMAL INSULATOR FILM

Shamouil Shamouilian; Sasson Somekh; Hyman J. Levinstein; Manoocher Birang; Semyon Sherstinsky; John F. Cameron

Archive | 1998

Puncture resistant electrostatic chuck

Arik Donde; Hyman J. Levinstein; Robert W. Wu; Andreas G. Hegedus; Edwin C. Weldon; Shamouil Shamouilian; Jon Clinton; Surinder S. Bedi

Archive | 1994

Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer

Manoocher Birang; Jian Ding; Hyman J. Levinstein

Archive | 1994

Self-cleaning polymer-free top electrode for parallel electrode etch operation

Robert W. Wu; Hyman J. Levinstein; Hongching Shan

Archive | 1996

Method of making electrostatic chuck with conformal insulator film

Shamouil Shamouilian; Sasson Somekh; Hyman J. Levinstein; Manoocher Birang; Semyon Sherstinsky; John F. Cameron

Archive | 1998

Method for forming titanium silicide in situ

Gene Y. Kohara; Fusen Chen; Hyman J. Levinstein; Zheng Xu; Peijun Ding; Gongda Yao; Hong Zhang

Archive | 1997

Stand-off pad for supporting a wafer on a substrate support chuck

Ananda H. Kumar; Shamouil Shamouilian; Hyman J. Levinstein; Vijay D. Parkhe

Archive | 1995

Method of determining a dechucking voltage which nullifies a residual electrostatic chuck and a wafer

Manoocher Birang; Jian Ding; Hyman J. Levinstein

Archive | 1998

Hybrid johnsen-rahbek electrostatic chuck and method of fabricating same

Dennis S. Grimard; Vijay D. Parkhe; Hyman J. Levinstein; Fusen Chen; Michael G. Chafin

Explore More

Collaboration

Dive into the Hyman J. Levinstein's collaboration.

Top Co-Authors
Avatar

Shamouil Shamouilian

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Manoocher Birang

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Vijay D. Parkhe

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Fusen Chen

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Jian Ding

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Robert W. Wu

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Andreas G. Hegedus

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Arik Donde

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Dennis S. Grimard

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Edwin C. Weldon

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge