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Dive into the research topics where Edwin C. Weldon is active.

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Featured researches published by Edwin C. Weldon.


Archive | 1997

Electrostatic chuck having improved gas conduits

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard


Archive | 1996

Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck

Arik Donde; Dan Maydan; Robert J. Steger; Edwin C. Weldon; Brian Lue; Timothy Dyer


Archive | 1999

Process chamber having improved gas distributor and method of manufacture

Gerhard Schneider; Edwin C. Weldon


Archive | 2002

Electrostatic chuck having composite dielectric layer and method of manufacture

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard


Archive | 1998

Puncture resistant electrostatic chuck

Arik Donde; Hyman J. Levinstein; Robert W. Wu; Andreas G. Hegedus; Edwin C. Weldon; Shamouil Shamouilian; Jon Clinton; Surinder S. Bedi


Archive | 2001

Methods of roughening a ceramic surface

Edwin C. Weldon; Yongxiang He; Hong Wang; Clifford C. Stow


Archive | 2002

Laser drilled surfaces for substrate processing chambers

Hong Wang; Yongxiang He; Yixing Lin; Edwin C. Weldon; Clifford C. Stow


Archive | 2000

Dielectric covered electrostatic chuck

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard


Archive | 2004

Electrostatic chuck having dielectric member with stacked layers and manufacture

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard


Archive | 1998

Thermally conductive conformal media

Gerhard Schneider; Edwin C. Weldon; Ananda H. Kumar; Kadthala R. Narendrnath

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