Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Andreas Meckes is active.

Publication


Featured researches published by Andreas Meckes.


Sensors and Actuators A-physical | 2002

Sensitivity Enhancement of MEMS Inertial Sensors Using Negative Springs and Active Control

Martin Handtmann; Robert Aigner; Andreas Meckes; G. Wachutka

In this paper we present a device in which the inherent control scheme of force feedback loops in Σ/Δ-archi-tecture [1] is used for increasing the mechanical sensitivity of differential capacitive inertial sensors in combination with “negative springs”. As a consequence, the input-referred electronic noise and quantization noise is significantly reduced in the signal band. Since electronic noise can influence the loop’s stability, Σ/Δ-theory is tailored to micromechanical sense loops. Results from system simulation and measurement of an accelerometer demonstrate a significant improvement in sensitivity.


Archive | 2004

Electronic device with cavity and a method for producing the same

Robert Aigner; Albert Auburger; Frank Daeche; Guenter Ehrler; Andreas Meckes; Horst Theuss; Michael Weber


Archive | 2004

Method for producing a cover, method for producing a packaged device

Robert Aigner; Martin Franosch; Andreas Meckes; Klaus-Guenter Oppermann; Marc Strasser


Archive | 2004

Method for producing a protective cover for a device

Martin Franosch; Andreas Meckes; Klaus-Günter Oppermann


Archive | 2003

Method for manufacturing a housing for a chip having a micromechanical structure

Frank Dache; Jochen Dangelmaier; Günter Ehrler; Andreas Meckes; Michael Weber


Archive | 2002

Production of a cover for a region of a substrate used for a SAW or BAW filter or a micromechanical element comprises forming a frame structure in the region of the substrate, and applying a lid structure on the frame structure

Andreas Meckes; Robert Aigner; Klaus Oppermann; Martin Franosch; Marc Strasser


Archive | 2002

Passivated baw resonator and baw filter

Robert Aigner; Guenter Ehrler; Lueder Elbrecht; Andreas Meckes; Winfried Nessler; Alfred Niklas; Hans-Joerg Timme


Archive | 2004

Apparatus for housing a micromechanical structure and method for producing the same

Martin Franosch; Andreas Meckes; Winfried Nessler; Klaus-Günter Oppermann


Archive | 2004

Elektronisches Bauteil mit Hohlraum und ein Verfahren zur Herstellung desselben

Michael Weber; Albert Auburger; Horst Theuss; Frank Daeche; Günter Ehrler; Andreas Meckes; Robert Aigner


Archive | 2004

Method for generating a protective cover for a device

Robert Aigner; Martin Franosch; Andreas Meckes; Klaus-Günter Oppermann; Marc Strasser

Collaboration


Dive into the Andreas Meckes's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge