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Anisul Khan

Applied Materials

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Publication

Featured researches published by Anisul Khan.

Archive | 2001

Method for dicing a semiconductor wafer

Ajay Kumar; Padmapani C. Nallan; Anisul Khan; Dragan Podlesnik

Archive | 2001

Two etchant etch method

Anisul Khan; Ajay Kumar; Jeffrey D. Chinn; Dragan Podlesnik

Archive | 2002

Method and apparatus for dicing a semiconductor wafer

Ajay Kumar; Padmapani C. Nallan; Anisul Khan; Dragan Podlesnik

Archive | 1999

Self cleaning method of forming deep trenches in silicon substrates

Anisul Khan; Ajay Kumar; Jeffrey D. Chinn; Dragan Podlesnik

Archive | 2002

Method of micromachining a multi-part cavity

Dragan Podlesnik; Thorsten Lill; Jeff Chinn; Shaoher X. Pan; Anisul Khan; Maocheng Li; Yiqiong Wang

Archive | 2000

Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion

Wei Liu; Yiqiong Wang; Maocheng Li; Anisul Khan; Shaoher Pan; Dragan Podlesnik

Archive | 1999

Plasma etching of silicon using fluorinated gas mixtures

Anisul Khan; Dragan Podlesnik; Nam-Hun Kim; Gene Lee

Archive | 2000

Apparatus for performing self cleaning method of forming deep trenches in silicon substrates

Anisul Khan; Ajay Kumar; Jeffrey D. Chinn; Dragan Podlesnik

Archive | 2002

Etching multi-shaped openings in silicon

Anisul Khan; Sharma Pamarthy; Sanjay Thekdi; Ajay Kumar

Archive | 2002

Process for in-situ etching a hardmask stack

Ajay Kumar; Anisul Khan; Sanjay Thekdi; Dragan Podlesnik

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Collaboration

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Ajay Kumar

Applied Materials

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Dragan Podlesnik

Applied Materials

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Jeffrey D. Chinn

Applied Materials

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Padmapani C. Nallan

Applied Materials

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Sanjay Thekdi

Applied Materials

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Sharma Pamarthy

Applied Materials

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Sunil Srinivasan

Applied Materials

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Yiqiong Wang

Applied Materials

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Jeff Chinn

Applied Materials

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Jennifer Y. Sun

Applied Materials

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